Structural and mechanical properties of TIN/BCN coatings

Monolayer TiN and a-BCN and nanolayer TiN/BCN coatings are deposited by dual magnetron sputtering. The effect of discharge power, flow rates of gases, and substrate bias voltage on the mechanical properties of the deposited nanolayer coatings is studied. The structure, chemical bonding, mechanical p...

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Veröffentlicht in:	Powder metallurgy and metal ceramics 2013-05, Vol.52 (1-2), p.73-82
Hauptverfasser:	Skrinskii, P. L., Kuzmichev, A. I., Ivashchenko, V. I., Ivashchenko, L. A., Timofeeva, I. I., Butenko, O. O., Khizhun, O. Yu, Tomila, T. V., Dub, S. N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analysis Ceramics Characterization and Evaluation of Materials Chemical properties Chemistry and Materials Science Coatings Coatings industry Composites Glass Hardness Materials Science Mechanical properties Metallic Materials Monomolecular films Natural Materials Nitrides
Online-Zugang:	Volltext
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