Structural and mechanical properties of TIN/BCN coatings

Monolayer TiN and a-BCN and nanolayer TiN/BCN coatings are deposited by dual magnetron sputtering. The effect of discharge power, flow rates of gases, and substrate bias voltage on the mechanical properties of the deposited nanolayer coatings is studied. The structure, chemical bonding, mechanical p...

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Veröffentlicht in:Powder metallurgy and metal ceramics 2013-05, Vol.52 (1-2), p.73-82
Hauptverfasser: Skrinskii, P. L., Kuzmichev, A. I., Ivashchenko, V. I., Ivashchenko, L. A., Timofeeva, I. I., Butenko, O. O., Khizhun, O. Yu, Tomila, T. V., Dub, S. N.
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container_end_page 82
container_issue 1-2
container_start_page 73
container_title Powder metallurgy and metal ceramics
container_volume 52
creator Skrinskii, P. L.
Kuzmichev, A. I.
Ivashchenko, V. I.
Ivashchenko, L. A.
Timofeeva, I. I.
Butenko, O. O.
Khizhun, O. Yu
Tomila, T. V.
Dub, S. N.
description Monolayer TiN and a-BCN and nanolayer TiN/BCN coatings are deposited by dual magnetron sputtering. The effect of discharge power, flow rates of gases, and substrate bias voltage on the mechanical properties of the deposited nanolayer coatings is studied. The structure, chemical bonding, mechanical properties, adhesion, and friction coefficient of the coatings are analyzed. It is established that the deposited nanolayer coatings have nc-TiN x /a-BNO+a-C structure. The Knoop hardness of the nanolayer TiN/BCN coatings is found to reach 45 GPa on average. The nanohardness is lower than the Knoop hardness (by 20–30%). The deposited nanolayer coatings can be recommended as wear-resistant and protective coatings for mechanical engineering.
doi_str_mv 10.1007/s11106-013-9497-7
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subjects Analysis
Ceramics
Characterization and Evaluation of Materials
Chemical properties
Chemistry and Materials Science
Coatings
Coatings industry
Composites
Glass
Hardness
Materials Science
Mechanical properties
Metallic Materials
Monomolecular films
Natural Materials
Nitrides
title Structural and mechanical properties of TIN/BCN coatings
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