Structural and mechanical properties of TIN/BCN coatings

Structural and mechanical properties of TIN/BCN coatings

Monolayer TiN and a-BCN and nanolayer TiN/BCN coatings are deposited by dual magnetron sputtering. The effect of discharge power, flow rates of gases, and substrate bias voltage on the mechanical properties of the deposited nanolayer coatings is studied. The structure, chemical bonding, mechanical p...

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Veröffentlicht in:Powder metallurgy and metal ceramics 2013-05, Vol.52 (1-2), p.73-82
Hauptverfasser: Skrinskii, P. L., Kuzmichev, A. I., Ivashchenko, V. I., Ivashchenko, L. A., Timofeeva, I. I., Butenko, O. O., Khizhun, O. Yu, Tomila, T. V., Dub, S. N.
Format: Artikel
Sprache:eng
Schlagworte:
Analysis
Ceramics
Characterization and Evaluation of Materials
Chemical properties
Chemistry and Materials Science
Coatings
Coatings industry
Composites
Glass
Hardness
Materials Science
Mechanical properties
Metallic Materials
Monomolecular films
Natural Materials
Nitrides
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Zusammenfassung:Monolayer TiN and a-BCN and nanolayer TiN/BCN coatings are deposited by dual magnetron sputtering. The effect of discharge power, flow rates of gases, and substrate bias voltage on the mechanical properties of the deposited nanolayer coatings is studied. The structure, chemical bonding, mechanical properties, adhesion, and friction coefficient of the coatings are analyzed. It is established that the deposited nanolayer coatings have nc-TiN x /a-BNO+a-C structure. The Knoop hardness of the nanolayer TiN/BCN coatings is found to reach 45 GPa on average. The nanohardness is lower than the Knoop hardness (by 20–30%). The deposited nanolayer coatings can be recommended as wear-resistant and protective coatings for mechanical engineering.
ISSN:1068-1302
1573-9066
DOI:10.1007/s11106-013-9497-7