Effect of process for producing Al2O3 particles on deposition efficiency in aerosol deposition method

The aerosol deposition method (ADM) is a technique to form dense films by impacting solid particles on a substrate. Dense ceramic films with thicknesses of over several µm can be formed directly on substrates even at room temperature by the ADM. In this study, to improve the deposition efficiency of...

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Veröffentlicht in:	Journal of the Ceramic Society of Japan 2014/01/01, Vol.122(1421), pp.110-116
Hauptverfasser:	NAOE, Kazuaki, SATO, Keishi, NISHIKI, Masashi
Format:	Artikel
Sprache:	eng
Schlagworte:	Aerosol deposition method Al2O3 particles Ceramic films Deposition efficiency Fracture energy
Online-Zugang:	Volltext
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