Laser Micro Drilling Using a Nanosecond-Pulse Bessel Beam

Laser Micro Drilling Using a Nanosecond-Pulse Bessel Beam

The feasibility was examined of using a Bessel beam (J0 beam) for laser micro drilling. A J0 beam, generated using a nanosecond pulse laser and an Axicon, was used to drill into 20 μm-thick SUS304 stainless steel foil. The fairly precise columnar penetration holes were about 3 μm in diameter, with a...

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Veröffentlicht in:Rēzā kenkyū 2004/05/15, Vol.32(5), pp.348-351
Hauptverfasser: MATSUOKA, Yoshihiko, KOHNO, Masamichi
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Bessel beam
Laser drill
Penetration hole
Pulse laser
Second harmonic generation
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KOHNO, Masamichi
description The feasibility was examined of using a Bessel beam (J0 beam) for laser micro drilling. A J0 beam, generated using a nanosecond pulse laser and an Axicon, was used to drill into 20 μm-thick SUS304 stainless steel foil. The fairly precise columnar penetration holes were about 3 μm in diameter, with an aspect ratio of approximately 7. A J0 beam can be used to process both transparent and opaque materials. The major problems of the present laser micro drill will be solved by using a J0 beam. It is thought that the excellent characteristics of laser drill using a J0 beam is given by the extremely deep focal depth a J0 beam has.
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subjects Bessel beam
Laser drill
Penetration hole
Pulse laser
Second harmonic generation
title Laser Micro Drilling Using a Nanosecond-Pulse Bessel Beam
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