Observation of Laser Drilled Micro Hole Shapes Using The Replica Method

The usefulness was examined of the replica method for observing the shapes of long drill holes several microns in diameter. The results closely agreed with the results of conventional sectional observation. Replicas of multiple drill holes in the same sample can be taken at the same time without the...

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Veröffentlicht in:	Rēzā kenkyū 2004/08/15, Vol.32(8), pp.535-537
Hauptverfasser:	MATSUOKA, Yoshihiko, KOHNO, Masamichi, TAKASE, Osamu
Format:	Artikel
Sprache:	eng
Schlagworte:	Laser scanning microscope Micro drilling Penetration hole Replica Silicone resin
Online-Zugang:	Volltext
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