Gas Phase Synthesis of Diamond Films

Many attempts to synthesize diamond films have been made recently because of the high potentiality for various applications. The films were produced by a variety of methods, including thermal chemical vapor deposition (CVD) using a hot tungsten filament, plasma CVD and photo-induced CVD. Among these...

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Veröffentlicht in:	Rēzā kenkyū 1988/10/28, Vol.16(10), pp.645-653
Hauptverfasser:	GOTOH, Yoshiyuki, YAGI, Toshinori, NAGAI, Haruhiko
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition Diamond film Diamond synthesis Emission spectra Excimer laser
Online-Zugang:	Volltext
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