Deposition of Carbon Films by Excimer Laser Photodecomposition of Aromatic Hydrocarbon

Deposition of hydrogenated carbon films by photodissociation of aromatic hydrocarbons using Ar F or Kr F excimer laser beam directed parallel to a substrate has been demonstrated. Infrared absorption spectrum and transmission election diffraction pattern show that the films mainly contain diamond li...

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Veröffentlicht in:	Rēzā kenkyū 1987/03/28, Vol.15(3), pp.160-169
Hauptverfasser:	MORIKAWA, Masato, HIRATSUKA, Yasuyuki, TAGUCHI, Toshihiro, TOYODA, Koichi
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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