Precise Micro Pattern Replication by Hot Embossing

The LIGA (Lithografie, Galvanoformung, Abformung [German: lithography, electroplating, and molding]) process is one of the promising techniques for fabrication of microstructures having high aspect ratios. Microstructures as high as a few hundred µm or more are widely used for various devices, such...

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Veröffentlicht in:	JSME International Journal Series A Solid Mechanics and Material Engineering 2006, Vol.49(1), pp.69-73
Hauptverfasser:	IDEI, Kazuyoshi, MEKARU, Harutaka, TAKEDA, Hiroaki, HATTORI, Tadashi
Format:	Artikel
Sprache:	eng
Schlagworte:	Hot Embossing LIGA Process Nickel Electroforming Vacuum X-Ray Lithography
Online-Zugang:	Volltext
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