Deposition of YBCO Film Using Multi-plume and Multi-turn PLD

We have investigated the high-speed deposition of YBa2Cu3O7-x (YBCO) using PLD on a CeO2-capped IBAD buffer layer. In order to speed up the coated conductor process, we introduced a continuous PLD system mainly consisting of high-power laser equipment and a vacuum chamber with a reel-to-reel substra...

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Veröffentlicht in:	TEION KOGAKU (Journal of Cryogenics and Superconductivity Society of Japan) 2004/11/25, Vol.39(11), pp.553-559
Hauptverfasser:	WATANABE, Tomonori, KURIKI, Reiji, IWAI, Hiroyuki, MIYATA, Seiki, MUROGA, Takemi, IBI, Akira, YAMADA, Yutaka, SHIOHARA, Yuh
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	IBAD multi-plume multi-turn PLD-CeO2 YBCO
Online-Zugang:	Volltext
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