High aspect ratio micromachining of glass by electrochemical discharge machining (ECDM)

Micromachining of glass is essential for several microfluidic components, micro-pumps, micro-accelerometers, micro-reactors, micro-fuel cells and several biomedical devices. Unique properties such as high chemical resistance, thermal stability and transparency give glass scope for additional applica...

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Veröffentlicht in:	Journal of manufacturing processes 2013-10, Vol.15 (4), p.460-466
Hauptverfasser:	Jui, Sumit K., Kamaraj, Abishek B., Sundaram, Murali M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electrochemical discharge machining Electrolytes Glass High aspect ratio Medical equipment Micromachining Production methods Studies
Online-Zugang:	Volltext
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