Trace Analysis of a Beryllium Window for a Solid State Detector System by Inductively Coupled Plasma Mass Spectrometry

Transition metallic impurities in high-purity Be for a window of the solid state detector (SSD) of a commercially available total-reflection X-ray fluorescence (TXRF) analyzer were determined by the use of ICP-MS analysis. From this analysis, 150μg/g of Fe and 100μg/g of Ni were detected. Other impu...

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Veröffentlicht in:	Analytical Sciences 1994/06/10, Vol.10(3), pp.477-480
Hauptverfasser:	KOZONO, Shuji, ITOH, Taizo, YOSHINAGA, Atsushi, OHKAWA, Shinji, YAKUSHIJI, Kenji
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical chemistry Beryllium Chemistry Exact sciences and technology inductively coupled plasma mass spectrometry metallic impurity silicon wafer solid state detector Spectrometric and optical methods total-reflection X-ray fluorescence trace analysis
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