Selective Growth of B-Doped Diamond on Si-Doped Diamond Film

Si doped CVD diamond films are prepared on Si substrate by means of hot filament chemical vapor deposition (HFCVD) through adding tetraethoxysilane (TEOS) into acetone as source of reactant gas during the growth process. The samples of diamond films are investigated by scanning electron micrograph (...

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Veröffentlicht in:	Applied Mechanics and Materials 2012-11, Vol.217-219, p.1013-1017
Hauptverfasser:	Zhang, Z.M., Sun, F.H., Shen, B., Cui, Y.X.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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