INVESTIGATION OF EFFECTS OF PLASMA COMPOSITION ELEMENTS BY THE CONTROLLED PLASMA ON THE SURFACE MODIFICATION OF THE CARBON MATERIAL

This investigation was conducted on the surface modification of the carbon material by the controlled R.F. glow discharge plasma with the objective of investigating the effects of plasma composition elements (plasma parameters). We looked into the effects of the light radiated from the plasma and th...

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Veröffentlicht in:	Journal of Photopolymer Science and Technology 1995, Vol.8(3), pp.351-362
Hauptverfasser:	OHTE, TAKEO, KATOH, MASAAKI, IZUMI, YORI, TOMIOKA, MASAMI, KOJIMA, AKIRA, OHTANI, SUGIO
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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