Advanced Algorithms for Etching Simulation of 3D MEMS-Tunable Lasers
The integrated circuits (ICs) industry uses a number of technology computer aided design (TCAD) software tools to simulate the manufacturing and the operation of many ICs at different levels. At very low level, the simulation tools are used to simulate the device fabrication and design. These simula...
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| Veröffentlicht in: | International Journal of Computer Theory and Engineering 2013-08, Vol.5 (4), p.721-725 |
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| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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