An Inchworm Using Levitation Caused by Vertical Vibration

We propose an inchworm type microactuator which uses levitation caused by vertical vibration. The vertical vibration is generated by a piezoelectric actuator. The inchworm usually consists of thrust elements and adhesive elements. The proposed inchworm type microactuator does not use any adhesive el...

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Veröffentlicht in:	Denki Gakkai ronbunshi. C, Erekutoronikusu, joho kogaku, shisutemu Information and Systems, 2010/12/01, Vol.130(12), pp.2135-2141
Hauptverfasser:	Torii, Akihiro, Kengaku, Satoshi, Yamada, Tomohiro, Ueda, Akiteru, Doki, Kae
Format:	Artikel
Sprache:	eng
Schlagworte:	inchworm micro actuator piezoelectric actuator positioning
Online-Zugang:	Volltext
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