Flexible Polymer Waveguides With Integrated Mirrors Fabricated by Soft Lithography for Optical Interconnection
Flexible polymer waveguides with integrated 45 ° mirrors to support surface normal optical coupling for optical interconnection were fabricated using a vacuum assisted microfluidic (VAM) soft lithographic technique. Waveguide array structures with slanted surfaces of the SU-8 master were realized by...
Gespeichert in:
| Veröffentlicht in: | Journal of lightwave technology 2013-06, Vol.31 (11), p.1835-1841 |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 1841 |
|---|---|
| container_issue | 11 |
| container_start_page | 1835 |
| container_title | Journal of lightwave technology |
| container_volume | 31 |
| creator | Guomin Jiang Baig, S. Wang, M. R. |
| description | Flexible polymer waveguides with integrated 45 ° mirrors to support surface normal optical coupling for optical interconnection were fabricated using a vacuum assisted microfluidic (VAM) soft lithographic technique. Waveguide array structures with slanted surfaces of the SU-8 master were realized by prism-assisted inclined UV lithography. The internal surface reflected UV light was utilized to eliminate undercut structures and to form the inclined surfaces on both ends of the straight waveguide structure via one-step UV exposure. Varying the inclined surface depth can result in different needed light coupling efficiency. A polydimethylsiloxane (PDMS) mold was subsequently created. The use of UV curable resins in the VAM fabrication resulted in the polymer waveguides with 45 ° integrated mirrors, demonstrating a coupling efficiency of 75% for full mirrors and 38% for half mirrors. |
| doi_str_mv | 10.1109/JLT.2013.2260132 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_proquest_journals_1352810404</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>6508856</ieee_id><sourcerecordid>1372619236</sourcerecordid><originalsourceid>FETCH-LOGICAL-c354t-d15bb10f1922a8292a3ff5556b6489cfa7009c454eac8288fd9fe4442d5cdd3d3</originalsourceid><addsrcrecordid>eNpdkc1LAzEQxYMoWKt3wUtABC9b87mbPYpYrVQqqPS4ZLMTjWw3NdmK_e9NbfHgaWDm9x6PeQidUjKilJRXD9OXESOUjxjL02B7aEClVBljlO-jASk4z1TBxCE6ivGDECqEKgaoG7fw7eoW8JNv1wsIeK6_4G3lGoh47vp3POl6eAu6hwY_uhB8iHis6-DM76pe42dvezxNqE_Y8n2NrQ94tuwT0f6qg_FdB6Z3vjtGB1a3EU52c4hex7cvN_fZdHY3ubmeZoZL0WcNlXVNiaUlY1qxkmlurZQyr3OhSmN1QUhphBSgjWJK2aa0IIRgjTRNwxs-RJdb32XwnyuIfbVw0UDb6g78KlaUFyxP7jxP6Pk_9MOvQpfSJUoyRYkgIlFkS5ngYwxgq2VwCx3WFSXVpoAqFVBtCqh2BSTJxc5Yx_QKG3RnXPzTsUKkDKJM3NmWcwDwd84lUUrm_AfMxo8O</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1352810404</pqid></control><display><type>article</type><title>Flexible Polymer Waveguides With Integrated Mirrors Fabricated by Soft Lithography for Optical Interconnection</title><source>IEEE Electronic Library (IEL)</source><creator>Guomin Jiang ; Baig, S. ; Wang, M. R.</creator><creatorcontrib>Guomin Jiang ; Baig, S. ; Wang, M. R.</creatorcontrib><description>Flexible polymer waveguides with integrated 45 ° mirrors to support surface normal optical coupling for optical interconnection were fabricated using a vacuum assisted microfluidic (VAM) soft lithographic technique. Waveguide array structures with slanted surfaces of the SU-8 master were realized by prism-assisted inclined UV lithography. The internal surface reflected UV light was utilized to eliminate undercut structures and to form the inclined surfaces on both ends of the straight waveguide structure via one-step UV exposure. Varying the inclined surface depth can result in different needed light coupling efficiency. A polydimethylsiloxane (PDMS) mold was subsequently created. The use of UV curable resins in the VAM fabrication resulted in the polymer waveguides with 45 ° integrated mirrors, demonstrating a coupling efficiency of 75% for full mirrors and 38% for half mirrors.</description><identifier>ISSN: 0733-8724</identifier><identifier>EISSN: 1558-2213</identifier><identifier>DOI: 10.1109/JLT.2013.2260132</identifier><identifier>CODEN: JLTEDG</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>45 ^{\circ} integrated mirrors ; Applied sciences ; Arrays ; Circuit properties ; Electric, optical and optoelectronic circuits ; Electronics ; Exact sciences and technology ; Flexible polymer waveguide ; Integrated optics. Optical fibers and wave guides ; Interconnection ; Joining ; Lithography ; Microelectronic fabrication (materials and surfaces technology) ; Mirrors ; Miscellaneous ; Molds ; Optical and optoelectronic circuits ; Optical coupling ; Optical device fabrication ; optical interconnection ; Optical surface waves ; Optical waveguides ; Polymers ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; soft lithography ; Surface waves ; Waveguides</subject><ispartof>Journal of lightwave technology, 2013-06, Vol.31 (11), p.1835-1841</ispartof><rights>2014 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2013</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c354t-d15bb10f1922a8292a3ff5556b6489cfa7009c454eac8288fd9fe4442d5cdd3d3</citedby><cites>FETCH-LOGICAL-c354t-d15bb10f1922a8292a3ff5556b6489cfa7009c454eac8288fd9fe4442d5cdd3d3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6508856$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27915,27916,54749</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6508856$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=27472649$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Guomin Jiang</creatorcontrib><creatorcontrib>Baig, S.</creatorcontrib><creatorcontrib>Wang, M. R.</creatorcontrib><title>Flexible Polymer Waveguides With Integrated Mirrors Fabricated by Soft Lithography for Optical Interconnection</title><title>Journal of lightwave technology</title><addtitle>JLT</addtitle><description>Flexible polymer waveguides with integrated 45 ° mirrors to support surface normal optical coupling for optical interconnection were fabricated using a vacuum assisted microfluidic (VAM) soft lithographic technique. Waveguide array structures with slanted surfaces of the SU-8 master were realized by prism-assisted inclined UV lithography. The internal surface reflected UV light was utilized to eliminate undercut structures and to form the inclined surfaces on both ends of the straight waveguide structure via one-step UV exposure. Varying the inclined surface depth can result in different needed light coupling efficiency. A polydimethylsiloxane (PDMS) mold was subsequently created. The use of UV curable resins in the VAM fabrication resulted in the polymer waveguides with 45 ° integrated mirrors, demonstrating a coupling efficiency of 75% for full mirrors and 38% for half mirrors.</description><subject>45 ^{\circ} integrated mirrors</subject><subject>Applied sciences</subject><subject>Arrays</subject><subject>Circuit properties</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Flexible polymer waveguide</subject><subject>Integrated optics. Optical fibers and wave guides</subject><subject>Interconnection</subject><subject>Joining</subject><subject>Lithography</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>Mirrors</subject><subject>Miscellaneous</subject><subject>Molds</subject><subject>Optical and optoelectronic circuits</subject><subject>Optical coupling</subject><subject>Optical device fabrication</subject><subject>optical interconnection</subject><subject>Optical surface waves</subject><subject>Optical waveguides</subject><subject>Polymers</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>soft lithography</subject><subject>Surface waves</subject><subject>Waveguides</subject><issn>0733-8724</issn><issn>1558-2213</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkc1LAzEQxYMoWKt3wUtABC9b87mbPYpYrVQqqPS4ZLMTjWw3NdmK_e9NbfHgaWDm9x6PeQidUjKilJRXD9OXESOUjxjL02B7aEClVBljlO-jASk4z1TBxCE6ivGDECqEKgaoG7fw7eoW8JNv1wsIeK6_4G3lGoh47vp3POl6eAu6hwY_uhB8iHis6-DM76pe42dvezxNqE_Y8n2NrQ94tuwT0f6qg_FdB6Z3vjtGB1a3EU52c4hex7cvN_fZdHY3ubmeZoZL0WcNlXVNiaUlY1qxkmlurZQyr3OhSmN1QUhphBSgjWJK2aa0IIRgjTRNwxs-RJdb32XwnyuIfbVw0UDb6g78KlaUFyxP7jxP6Pk_9MOvQpfSJUoyRYkgIlFkS5ngYwxgq2VwCx3WFSXVpoAqFVBtCqh2BSTJxc5Yx_QKG3RnXPzTsUKkDKJM3NmWcwDwd84lUUrm_AfMxo8O</recordid><startdate>20130601</startdate><enddate>20130601</enddate><creator>Guomin Jiang</creator><creator>Baig, S.</creator><creator>Wang, M. R.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20130601</creationdate><title>Flexible Polymer Waveguides With Integrated Mirrors Fabricated by Soft Lithography for Optical Interconnection</title><author>Guomin Jiang ; Baig, S. ; Wang, M. R.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c354t-d15bb10f1922a8292a3ff5556b6489cfa7009c454eac8288fd9fe4442d5cdd3d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>45 ^{\circ} integrated mirrors</topic><topic>Applied sciences</topic><topic>Arrays</topic><topic>Circuit properties</topic><topic>Electric, optical and optoelectronic circuits</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Flexible polymer waveguide</topic><topic>Integrated optics. Optical fibers and wave guides</topic><topic>Interconnection</topic><topic>Joining</topic><topic>Lithography</topic><topic>Microelectronic fabrication (materials and surfaces technology)</topic><topic>Mirrors</topic><topic>Miscellaneous</topic><topic>Molds</topic><topic>Optical and optoelectronic circuits</topic><topic>Optical coupling</topic><topic>Optical device fabrication</topic><topic>optical interconnection</topic><topic>Optical surface waves</topic><topic>Optical waveguides</topic><topic>Polymers</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>soft lithography</topic><topic>Surface waves</topic><topic>Waveguides</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Guomin Jiang</creatorcontrib><creatorcontrib>Baig, S.</creatorcontrib><creatorcontrib>Wang, M. R.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of lightwave technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Guomin Jiang</au><au>Baig, S.</au><au>Wang, M. R.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Flexible Polymer Waveguides With Integrated Mirrors Fabricated by Soft Lithography for Optical Interconnection</atitle><jtitle>Journal of lightwave technology</jtitle><stitle>JLT</stitle><date>2013-06-01</date><risdate>2013</risdate><volume>31</volume><issue>11</issue><spage>1835</spage><epage>1841</epage><pages>1835-1841</pages><issn>0733-8724</issn><eissn>1558-2213</eissn><coden>JLTEDG</coden><abstract>Flexible polymer waveguides with integrated 45 ° mirrors to support surface normal optical coupling for optical interconnection were fabricated using a vacuum assisted microfluidic (VAM) soft lithographic technique. Waveguide array structures with slanted surfaces of the SU-8 master were realized by prism-assisted inclined UV lithography. The internal surface reflected UV light was utilized to eliminate undercut structures and to form the inclined surfaces on both ends of the straight waveguide structure via one-step UV exposure. Varying the inclined surface depth can result in different needed light coupling efficiency. A polydimethylsiloxane (PDMS) mold was subsequently created. The use of UV curable resins in the VAM fabrication resulted in the polymer waveguides with 45 ° integrated mirrors, demonstrating a coupling efficiency of 75% for full mirrors and 38% for half mirrors.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JLT.2013.2260132</doi><tpages>7</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 0733-8724 |
| ispartof | Journal of lightwave technology, 2013-06, Vol.31 (11), p.1835-1841 |
| issn | 0733-8724 1558-2213 |
| language | eng |
| recordid | cdi_proquest_journals_1352810404 |
| source | IEEE Electronic Library (IEL) |
| subjects | 45 ^{\circ} integrated mirrors Applied sciences Arrays Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Flexible polymer waveguide Integrated optics. Optical fibers and wave guides Interconnection Joining Lithography Microelectronic fabrication (materials and surfaces technology) Mirrors Miscellaneous Molds Optical and optoelectronic circuits Optical coupling Optical device fabrication optical interconnection Optical surface waves Optical waveguides Polymers Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices soft lithography Surface waves Waveguides |
| title | Flexible Polymer Waveguides With Integrated Mirrors Fabricated by Soft Lithography for Optical Interconnection |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-15T03%3A18%3A36IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Flexible%20Polymer%20Waveguides%20With%20Integrated%20Mirrors%20Fabricated%20by%20Soft%20Lithography%20for%20Optical%20Interconnection&rft.jtitle=Journal%20of%20lightwave%20technology&rft.au=Guomin%20Jiang&rft.date=2013-06-01&rft.volume=31&rft.issue=11&rft.spage=1835&rft.epage=1841&rft.pages=1835-1841&rft.issn=0733-8724&rft.eissn=1558-2213&rft.coden=JLTEDG&rft_id=info:doi/10.1109/JLT.2013.2260132&rft_dat=%3Cproquest_RIE%3E1372619236%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1352810404&rft_id=info:pmid/&rft_ieee_id=6508856&rfr_iscdi=true |