Synthesis of dual-functional copolymer with orthogonally photosensitive groups

A dual‐functional copolymer, poly(4‐styrenesulfonyl azide‐co‐t‐butyl‐methacrylate), with built‐in photoacid labile and photocrosslinkable components was designed and synthesized by radical copolymerization. The mixture of copolymer and photoacid generators was spin coated on aminosilane treated Si w...

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Veröffentlicht in:	Journal of polymer science. Part A, Polymer chemistry Polymer chemistry, 2013-03, Vol.51 (5), p.1215-1222
Hauptverfasser:	Xu, Lebo, Farrell, John, Karunakaran, Raghuraman G., Honglawan, Apiradee, Yang, Shu
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences copolymerization crosslinking Exact sciences and technology lithography Organic polymers photochemistry Physicochemistry of polymers Polymers with particular properties Preparation, kinetics, thermodynamics, mechanism and catalysts surfaces thin films
Online-Zugang:	Volltext
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