Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature

In this paper, we investigate poly‐crystal indium tin oxide (ITO) film produced by a multi‐step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposi...

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Veröffentlicht in:	Surface and interface analysis 2012-12, Vol.44 (13), p.1606-1610
Hauptverfasser:	Son, Phil Kook, Choi, Suk-Won, Kim, Sung Soo, Gwag, Jin Seog
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology ion beam ITO film multi-step treatment Physics resistivity X-ray diffraction
Online-Zugang:	Volltext
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