Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature
In this paper, we investigate poly‐crystal indium tin oxide (ITO) film produced by a multi‐step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposi...
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Veröffentlicht in: | Surface and interface analysis 2012-12, Vol.44 (13), p.1606-1610 |
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description | In this paper, we investigate poly‐crystal indium tin oxide (ITO) film produced by a multi‐step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposition is complete, and this process is carried out repeatedly until the required film thickness is achieved. X‐ray diffraction indicates that the ITO film deposited by our multi‐step ion beam treatment has an almost poly‐crystal structure with a morsel of amorphous structure in the PET layers. As a supplementary measurement, a contact angle method shows that the poly‐crystal structure is due to a surface charge effect. Consequently, the electrical conductivity of the ITO film (resistivity measurement error bar |
doi_str_mv | 10.1002/sia.5097 |
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In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposition is complete, and this process is carried out repeatedly until the required film thickness is achieved. X‐ray diffraction indicates that the ITO film deposited by our multi‐step ion beam treatment has an almost poly‐crystal structure with a morsel of amorphous structure in the PET layers. As a supplementary measurement, a contact angle method shows that the poly‐crystal structure is due to a surface charge effect. Consequently, the electrical conductivity of the ITO film (resistivity measurement error bar < 0.7%) with the multi‐step ion beam treatment is eight times higher than that of single‐treated ITO film, due to this poly‐crystal structure. Copyright © 2012 John Wiley & Sons, Ltd.</description><identifier>ISSN: 0142-2421</identifier><identifier>EISSN: 1096-9918</identifier><identifier>DOI: 10.1002/sia.5097</identifier><identifier>CODEN: SIANDQ</identifier><language>eng</language><publisher>Chichester: Blackwell Publishing Ltd</publisher><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; ion beam ; ITO film ; multi-step treatment ; Physics ; resistivity ; X-ray diffraction</subject><ispartof>Surface and interface analysis, 2012-12, Vol.44 (13), p.1606-1610</ispartof><rights>Copyright © 2012 John Wiley & Sons, Ltd.</rights><rights>2014 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3617-5dda4dfe7aeaacb3e47d971e537f4205bc472714a366c813b0d6d31c6255f1a73</citedby><cites>FETCH-LOGICAL-c3617-5dda4dfe7aeaacb3e47d971e537f4205bc472714a366c813b0d6d31c6255f1a73</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Fsia.5097$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Fsia.5097$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>315,781,785,1418,27928,27929,45578,45579</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=26603929$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Son, Phil Kook</creatorcontrib><creatorcontrib>Choi, Suk-Won</creatorcontrib><creatorcontrib>Kim, Sung Soo</creatorcontrib><creatorcontrib>Gwag, Jin Seog</creatorcontrib><title>Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature</title><title>Surface and interface analysis</title><addtitle>Surf. Interface Anal</addtitle><description>In this paper, we investigate poly‐crystal indium tin oxide (ITO) film produced by a multi‐step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposition is complete, and this process is carried out repeatedly until the required film thickness is achieved. X‐ray diffraction indicates that the ITO film deposited by our multi‐step ion beam treatment has an almost poly‐crystal structure with a morsel of amorphous structure in the PET layers. As a supplementary measurement, a contact angle method shows that the poly‐crystal structure is due to a surface charge effect. Consequently, the electrical conductivity of the ITO film (resistivity measurement error bar < 0.7%) with the multi‐step ion beam treatment is eight times higher than that of single‐treated ITO film, due to this poly‐crystal structure. Copyright © 2012 John Wiley & Sons, Ltd.</description><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>ion beam</subject><subject>ITO film</subject><subject>multi-step treatment</subject><subject>Physics</subject><subject>resistivity</subject><subject>X-ray diffraction</subject><issn>0142-2421</issn><issn>1096-9918</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNp10FtLHDEYxvFQKrhVwY8QKIXejOYwk-xcyuJhxRO6RfAmvJN5A7FzapKxnW_fkV288yoQfvxfeAg55uyEMyZOo4eTgpX6C1lwVqqsLPnyK1kwnotM5ILvk28xvjLGlnKpFgRXfVePNvk3nybaO7re3FPnm5ZCOzTeeaxpNdF2bJLPYsKB-r6jFUKbpYCQWuwSnX8ezje0gQlDpJBo6PuWJmwHDJDGgIdkz0ET8Wj3HpBfF-eb1VV2c3-5Xp3dZFYqrrOiriGvHWpAAFtJzHVdao6F1C4XrKhsroXmOUil7JLLitWqltwqURSOg5YH5Pu2O4T-z4gxmdd-DN180nCutZJS5WJWP7fKhj7GgM4MwbcQJsOZeR_RzCOa9xFn-mMXhGihcQE66-OHF0oxWYpydtnW_fUNTp_2zNP6bNfdeT9v-u_DQ_htlJa6MM93l-b2-uHl6lFszIX8D93QjzQ</recordid><startdate>201212</startdate><enddate>201212</enddate><creator>Son, Phil Kook</creator><creator>Choi, Suk-Won</creator><creator>Kim, Sung Soo</creator><creator>Gwag, Jin Seog</creator><general>Blackwell Publishing Ltd</general><general>Wiley</general><general>Wiley Subscription Services, Inc</general><scope>BSCLL</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>201212</creationdate><title>Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature</title><author>Son, Phil Kook ; Choi, Suk-Won ; Kim, Sung Soo ; Gwag, Jin Seog</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c3617-5dda4dfe7aeaacb3e47d971e537f4205bc472714a366c813b0d6d31c6255f1a73</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>ion beam</topic><topic>ITO film</topic><topic>multi-step treatment</topic><topic>Physics</topic><topic>resistivity</topic><topic>X-ray diffraction</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Son, Phil Kook</creatorcontrib><creatorcontrib>Choi, Suk-Won</creatorcontrib><creatorcontrib>Kim, Sung Soo</creatorcontrib><creatorcontrib>Gwag, Jin Seog</creatorcontrib><collection>Istex</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Surface and interface analysis</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Son, Phil Kook</au><au>Choi, Suk-Won</au><au>Kim, Sung Soo</au><au>Gwag, Jin Seog</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature</atitle><jtitle>Surface and interface analysis</jtitle><addtitle>Surf. Interface Anal</addtitle><date>2012-12</date><risdate>2012</risdate><volume>44</volume><issue>13</issue><spage>1606</spage><epage>1610</epage><pages>1606-1610</pages><issn>0142-2421</issn><eissn>1096-9918</eissn><coden>SIANDQ</coden><abstract>In this paper, we investigate poly‐crystal indium tin oxide (ITO) film produced by a multi‐step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposition is complete, and this process is carried out repeatedly until the required film thickness is achieved. X‐ray diffraction indicates that the ITO film deposited by our multi‐step ion beam treatment has an almost poly‐crystal structure with a morsel of amorphous structure in the PET layers. As a supplementary measurement, a contact angle method shows that the poly‐crystal structure is due to a surface charge effect. Consequently, the electrical conductivity of the ITO film (resistivity measurement error bar < 0.7%) with the multi‐step ion beam treatment is eight times higher than that of single‐treated ITO film, due to this poly‐crystal structure. Copyright © 2012 John Wiley & Sons, Ltd.</abstract><cop>Chichester</cop><pub>Blackwell Publishing Ltd</pub><doi>10.1002/sia.5097</doi><tpages>5</tpages></addata></record> |
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subjects | Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology ion beam ITO film multi-step treatment Physics resistivity X-ray diffraction |
title | Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature |
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