Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature

In this paper, we investigate poly‐crystal indium tin oxide (ITO) film produced by a multi‐step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposi...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Surface and interface analysis 2012-12, Vol.44 (13), p.1606-1610
Hauptverfasser: Son, Phil Kook, Choi, Suk-Won, Kim, Sung Soo, Gwag, Jin Seog
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 1610
container_issue 13
container_start_page 1606
container_title Surface and interface analysis
container_volume 44
creator Son, Phil Kook
Choi, Suk-Won
Kim, Sung Soo
Gwag, Jin Seog
description In this paper, we investigate poly‐crystal indium tin oxide (ITO) film produced by a multi‐step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposition is complete, and this process is carried out repeatedly until the required film thickness is achieved. X‐ray diffraction indicates that the ITO film deposited by our multi‐step ion beam treatment has an almost poly‐crystal structure with a morsel of amorphous structure in the PET layers. As a supplementary measurement, a contact angle method shows that the poly‐crystal structure is due to a surface charge effect. Consequently, the electrical conductivity of the ITO film (resistivity measurement error bar 
doi_str_mv 10.1002/sia.5097
format Article
fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_1177633642</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2820540331</sourcerecordid><originalsourceid>FETCH-LOGICAL-c3617-5dda4dfe7aeaacb3e47d971e537f4205bc472714a366c813b0d6d31c6255f1a73</originalsourceid><addsrcrecordid>eNp10FtLHDEYxvFQKrhVwY8QKIXejOYwk-xcyuJhxRO6RfAmvJN5A7FzapKxnW_fkV288yoQfvxfeAg55uyEMyZOo4eTgpX6C1lwVqqsLPnyK1kwnotM5ILvk28xvjLGlnKpFgRXfVePNvk3nybaO7re3FPnm5ZCOzTeeaxpNdF2bJLPYsKB-r6jFUKbpYCQWuwSnX8ezje0gQlDpJBo6PuWJmwHDJDGgIdkz0ET8Wj3HpBfF-eb1VV2c3-5Xp3dZFYqrrOiriGvHWpAAFtJzHVdao6F1C4XrKhsroXmOUil7JLLitWqltwqURSOg5YH5Pu2O4T-z4gxmdd-DN180nCutZJS5WJWP7fKhj7GgM4MwbcQJsOZeR_RzCOa9xFn-mMXhGihcQE66-OHF0oxWYpydtnW_fUNTp_2zNP6bNfdeT9v-u_DQ_htlJa6MM93l-b2-uHl6lFszIX8D93QjzQ</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1177633642</pqid></control><display><type>article</type><title>Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature</title><source>Wiley Online Library - AutoHoldings Journals</source><creator>Son, Phil Kook ; Choi, Suk-Won ; Kim, Sung Soo ; Gwag, Jin Seog</creator><creatorcontrib>Son, Phil Kook ; Choi, Suk-Won ; Kim, Sung Soo ; Gwag, Jin Seog</creatorcontrib><description>In this paper, we investigate poly‐crystal indium tin oxide (ITO) film produced by a multi‐step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposition is complete, and this process is carried out repeatedly until the required film thickness is achieved. X‐ray diffraction indicates that the ITO film deposited by our multi‐step ion beam treatment has an almost poly‐crystal structure with a morsel of amorphous structure in the PET layers. As a supplementary measurement, a contact angle method shows that the poly‐crystal structure is due to a surface charge effect. Consequently, the electrical conductivity of the ITO film (resistivity measurement error bar &lt; 0.7%) with the multi‐step ion beam treatment is eight times higher than that of single‐treated ITO film, due to this poly‐crystal structure. Copyright © 2012 John Wiley &amp; Sons, Ltd.</description><identifier>ISSN: 0142-2421</identifier><identifier>EISSN: 1096-9918</identifier><identifier>DOI: 10.1002/sia.5097</identifier><identifier>CODEN: SIANDQ</identifier><language>eng</language><publisher>Chichester: Blackwell Publishing Ltd</publisher><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; ion beam ; ITO film ; multi-step treatment ; Physics ; resistivity ; X-ray diffraction</subject><ispartof>Surface and interface analysis, 2012-12, Vol.44 (13), p.1606-1610</ispartof><rights>Copyright © 2012 John Wiley &amp; Sons, Ltd.</rights><rights>2014 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3617-5dda4dfe7aeaacb3e47d971e537f4205bc472714a366c813b0d6d31c6255f1a73</citedby><cites>FETCH-LOGICAL-c3617-5dda4dfe7aeaacb3e47d971e537f4205bc472714a366c813b0d6d31c6255f1a73</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Fsia.5097$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Fsia.5097$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>315,781,785,1418,27928,27929,45578,45579</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=26603929$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Son, Phil Kook</creatorcontrib><creatorcontrib>Choi, Suk-Won</creatorcontrib><creatorcontrib>Kim, Sung Soo</creatorcontrib><creatorcontrib>Gwag, Jin Seog</creatorcontrib><title>Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature</title><title>Surface and interface analysis</title><addtitle>Surf. Interface Anal</addtitle><description>In this paper, we investigate poly‐crystal indium tin oxide (ITO) film produced by a multi‐step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposition is complete, and this process is carried out repeatedly until the required film thickness is achieved. X‐ray diffraction indicates that the ITO film deposited by our multi‐step ion beam treatment has an almost poly‐crystal structure with a morsel of amorphous structure in the PET layers. As a supplementary measurement, a contact angle method shows that the poly‐crystal structure is due to a surface charge effect. Consequently, the electrical conductivity of the ITO film (resistivity measurement error bar &lt; 0.7%) with the multi‐step ion beam treatment is eight times higher than that of single‐treated ITO film, due to this poly‐crystal structure. Copyright © 2012 John Wiley &amp; Sons, Ltd.</description><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>ion beam</subject><subject>ITO film</subject><subject>multi-step treatment</subject><subject>Physics</subject><subject>resistivity</subject><subject>X-ray diffraction</subject><issn>0142-2421</issn><issn>1096-9918</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNp10FtLHDEYxvFQKrhVwY8QKIXejOYwk-xcyuJhxRO6RfAmvJN5A7FzapKxnW_fkV288yoQfvxfeAg55uyEMyZOo4eTgpX6C1lwVqqsLPnyK1kwnotM5ILvk28xvjLGlnKpFgRXfVePNvk3nybaO7re3FPnm5ZCOzTeeaxpNdF2bJLPYsKB-r6jFUKbpYCQWuwSnX8ezje0gQlDpJBo6PuWJmwHDJDGgIdkz0ET8Wj3HpBfF-eb1VV2c3-5Xp3dZFYqrrOiriGvHWpAAFtJzHVdao6F1C4XrKhsroXmOUil7JLLitWqltwqURSOg5YH5Pu2O4T-z4gxmdd-DN180nCutZJS5WJWP7fKhj7GgM4MwbcQJsOZeR_RzCOa9xFn-mMXhGihcQE66-OHF0oxWYpydtnW_fUNTp_2zNP6bNfdeT9v-u_DQ_htlJa6MM93l-b2-uHl6lFszIX8D93QjzQ</recordid><startdate>201212</startdate><enddate>201212</enddate><creator>Son, Phil Kook</creator><creator>Choi, Suk-Won</creator><creator>Kim, Sung Soo</creator><creator>Gwag, Jin Seog</creator><general>Blackwell Publishing Ltd</general><general>Wiley</general><general>Wiley Subscription Services, Inc</general><scope>BSCLL</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>201212</creationdate><title>Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature</title><author>Son, Phil Kook ; Choi, Suk-Won ; Kim, Sung Soo ; Gwag, Jin Seog</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c3617-5dda4dfe7aeaacb3e47d971e537f4205bc472714a366c813b0d6d31c6255f1a73</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>ion beam</topic><topic>ITO film</topic><topic>multi-step treatment</topic><topic>Physics</topic><topic>resistivity</topic><topic>X-ray diffraction</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Son, Phil Kook</creatorcontrib><creatorcontrib>Choi, Suk-Won</creatorcontrib><creatorcontrib>Kim, Sung Soo</creatorcontrib><creatorcontrib>Gwag, Jin Seog</creatorcontrib><collection>Istex</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Surface and interface analysis</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Son, Phil Kook</au><au>Choi, Suk-Won</au><au>Kim, Sung Soo</au><au>Gwag, Jin Seog</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature</atitle><jtitle>Surface and interface analysis</jtitle><addtitle>Surf. Interface Anal</addtitle><date>2012-12</date><risdate>2012</risdate><volume>44</volume><issue>13</issue><spage>1606</spage><epage>1610</epage><pages>1606-1610</pages><issn>0142-2421</issn><eissn>1096-9918</eissn><coden>SIANDQ</coden><abstract>In this paper, we investigate poly‐crystal indium tin oxide (ITO) film produced by a multi‐step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposition is complete, and this process is carried out repeatedly until the required film thickness is achieved. X‐ray diffraction indicates that the ITO film deposited by our multi‐step ion beam treatment has an almost poly‐crystal structure with a morsel of amorphous structure in the PET layers. As a supplementary measurement, a contact angle method shows that the poly‐crystal structure is due to a surface charge effect. Consequently, the electrical conductivity of the ITO film (resistivity measurement error bar &lt; 0.7%) with the multi‐step ion beam treatment is eight times higher than that of single‐treated ITO film, due to this poly‐crystal structure. Copyright © 2012 John Wiley &amp; Sons, Ltd.</abstract><cop>Chichester</cop><pub>Blackwell Publishing Ltd</pub><doi>10.1002/sia.5097</doi><tpages>5</tpages></addata></record>
fulltext fulltext
identifier ISSN: 0142-2421
ispartof Surface and interface analysis, 2012-12, Vol.44 (13), p.1606-1610
issn 0142-2421
1096-9918
language eng
recordid cdi_proquest_journals_1177633642
source Wiley Online Library - AutoHoldings Journals
subjects Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
ion beam
ITO film
multi-step treatment
Physics
resistivity
X-ray diffraction
title Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-17T09%3A06%3A24IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Conductivity%20of%20ITO%20film%20amplified%20by%20multi-step%20ion%20beam-treatment%20on%20PET%20layers%20at%20room%20temperature&rft.jtitle=Surface%20and%20interface%20analysis&rft.au=Son,%20Phil%20Kook&rft.date=2012-12&rft.volume=44&rft.issue=13&rft.spage=1606&rft.epage=1610&rft.pages=1606-1610&rft.issn=0142-2421&rft.eissn=1096-9918&rft.coden=SIANDQ&rft_id=info:doi/10.1002/sia.5097&rft_dat=%3Cproquest_cross%3E2820540331%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1177633642&rft_id=info:pmid/&rfr_iscdi=true