Surface Modification of DLC Film Due to Oxygen-Plasma Exposure, Observed by IR Absorption Spectroscopy in Multiple-Internal-Reflection Geometry
We investigated the surface modification of diamond-like carbon film during its exposure to oxygen plasma, at different substrate temperatures. Observation of infrared spectral changes reveals that, during plasma exposure, OH groups are formed in the film. With increasing substrate temperature, OH f...
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| Veröffentlicht in: | IEEE transactions on plasma science 2012-10, Vol.40 (10), p.2756-2761 |
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| container_title | IEEE transactions on plasma science |
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| creator | Shinohara, M. Takaki, Y. Takami, Y. Matuda, Y. Fujiyama, H. |
| description | We investigated the surface modification of diamond-like carbon film during its exposure to oxygen plasma, at different substrate temperatures. Observation of infrared spectral changes reveals that, during plasma exposure, OH groups are formed in the film. With increasing substrate temperature, OH formation suppresses, and hydrogen content decreases. Thus, we speculate that, with increasing temperature during the exposure, insertion of oxygen into C-H bonds decreases, and hydrogen abstraction from the film increases. |
| doi_str_mv | 10.1109/TPS.2012.2208766 |
| format | Article |
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Observation of infrared spectral changes reveals that, during plasma exposure, OH groups are formed in the film. With increasing substrate temperature, OH formation suppresses, and hydrogen content decreases. Thus, we speculate that, with increasing temperature during the exposure, insertion of oxygen into C-H bonds decreases, and hydrogen abstraction from the film increases.</description><identifier>ISSN: 0093-3813</identifier><identifier>EISSN: 1939-9375</identifier><identifier>DOI: 10.1109/TPS.2012.2208766</identifier><identifier>CODEN: ITPSBD</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Chemical bonds ; Chemical elements ; Diamond-like carbon ; Diamond-like carbon (DLC) ; Geometry ; Hydrogen ; infrared (IR) spectroscopy ; oxidation ; oxygen plasma ; Plasma physics ; Plasma temperature ; Spectrum analysis ; Substrates ; Surface treatment ; Temperature ; Temperature measurement ; Thin films</subject><ispartof>IEEE transactions on plasma science, 2012-10, Vol.40 (10), p.2756-2761</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Oct 2012</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c357t-afcef6359efec0ac71711fc225df1ed8b325c3011de111a0b7c407ebce33a06b3</citedby><cites>FETCH-LOGICAL-c357t-afcef6359efec0ac71711fc225df1ed8b325c3011de111a0b7c407ebce33a06b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6269116$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6269116$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Shinohara, M.</creatorcontrib><creatorcontrib>Takaki, Y.</creatorcontrib><creatorcontrib>Takami, Y.</creatorcontrib><creatorcontrib>Matuda, Y.</creatorcontrib><creatorcontrib>Fujiyama, H.</creatorcontrib><title>Surface Modification of DLC Film Due to Oxygen-Plasma Exposure, Observed by IR Absorption Spectroscopy in Multiple-Internal-Reflection Geometry</title><title>IEEE transactions on plasma science</title><addtitle>TPS</addtitle><description>We investigated the surface modification of diamond-like carbon film during its exposure to oxygen plasma, at different substrate temperatures. Observation of infrared spectral changes reveals that, during plasma exposure, OH groups are formed in the film. With increasing substrate temperature, OH formation suppresses, and hydrogen content decreases. Thus, we speculate that, with increasing temperature during the exposure, insertion of oxygen into C-H bonds decreases, and hydrogen abstraction from the film increases.</description><subject>Chemical bonds</subject><subject>Chemical elements</subject><subject>Diamond-like carbon</subject><subject>Diamond-like carbon (DLC)</subject><subject>Geometry</subject><subject>Hydrogen</subject><subject>infrared (IR) spectroscopy</subject><subject>oxidation</subject><subject>oxygen plasma</subject><subject>Plasma physics</subject><subject>Plasma temperature</subject><subject>Spectrum analysis</subject><subject>Substrates</subject><subject>Surface treatment</subject><subject>Temperature</subject><subject>Temperature measurement</subject><subject>Thin films</subject><issn>0093-3813</issn><issn>1939-9375</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kE1PwkAURSdGExHdm7iZxK3FeTO0pUvClyQQCOC6mU7fmJLSqTOtob_Cv2wrxtXbnHtz3yHkEdgAgEWvh-1-wBnwAedsFAbBFelBJCIvEqF_TXqMRcITIxC35M65I2Mw9Bnvke99bbVUSNcmzXSmZJWZghpNp6sJnWf5iU5rpJWhm3PzgYW3zaU7STo7l8bVFl_oJnFovzClSUOXOzpOnLHlb8m-RFVZ45QpG5oVdF3nVVbm6C2LCm0hc2-HOm-ZDl6gOWFlm3tyo2Xu8OHv9sn7fHaYvHmrzWI5Ga88Jfyw8qRWqAPhR6hRMalCCAG04txPNWA6SgT3lWAAKQKAZEmohizERKEQkgWJ6JPnS29pzWeNroqPpu5Gubi16ftcBIy3FLtQqv3DWdRxabOTtE0LxZ32uNUed9rjP-1t5OkSyRDxHw94EAEE4geOZICO</recordid><startdate>20121001</startdate><enddate>20121001</enddate><creator>Shinohara, M.</creator><creator>Takaki, Y.</creator><creator>Takami, Y.</creator><creator>Matuda, Y.</creator><creator>Fujiyama, H.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20121001</creationdate><title>Surface Modification of DLC Film Due to Oxygen-Plasma Exposure, Observed by IR Absorption Spectroscopy in Multiple-Internal-Reflection Geometry</title><author>Shinohara, M. ; Takaki, Y. ; Takami, Y. ; Matuda, Y. ; Fujiyama, H.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c357t-afcef6359efec0ac71711fc225df1ed8b325c3011de111a0b7c407ebce33a06b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Chemical bonds</topic><topic>Chemical elements</topic><topic>Diamond-like carbon</topic><topic>Diamond-like carbon (DLC)</topic><topic>Geometry</topic><topic>Hydrogen</topic><topic>infrared (IR) spectroscopy</topic><topic>oxidation</topic><topic>oxygen plasma</topic><topic>Plasma physics</topic><topic>Plasma temperature</topic><topic>Spectrum analysis</topic><topic>Substrates</topic><topic>Surface treatment</topic><topic>Temperature</topic><topic>Temperature measurement</topic><topic>Thin films</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Shinohara, M.</creatorcontrib><creatorcontrib>Takaki, Y.</creatorcontrib><creatorcontrib>Takami, Y.</creatorcontrib><creatorcontrib>Matuda, Y.</creatorcontrib><creatorcontrib>Fujiyama, H.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on plasma science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Shinohara, M.</au><au>Takaki, Y.</au><au>Takami, Y.</au><au>Matuda, Y.</au><au>Fujiyama, H.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Surface Modification of DLC Film Due to Oxygen-Plasma Exposure, Observed by IR Absorption Spectroscopy in Multiple-Internal-Reflection Geometry</atitle><jtitle>IEEE transactions on plasma science</jtitle><stitle>TPS</stitle><date>2012-10-01</date><risdate>2012</risdate><volume>40</volume><issue>10</issue><spage>2756</spage><epage>2761</epage><pages>2756-2761</pages><issn>0093-3813</issn><eissn>1939-9375</eissn><coden>ITPSBD</coden><abstract>We investigated the surface modification of diamond-like carbon film during its exposure to oxygen plasma, at different substrate temperatures. Observation of infrared spectral changes reveals that, during plasma exposure, OH groups are formed in the film. With increasing substrate temperature, OH formation suppresses, and hydrogen content decreases. Thus, we speculate that, with increasing temperature during the exposure, insertion of oxygen into C-H bonds decreases, and hydrogen abstraction from the film increases.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TPS.2012.2208766</doi><tpages>6</tpages></addata></record> |
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| subjects | Chemical bonds Chemical elements Diamond-like carbon Diamond-like carbon (DLC) Geometry Hydrogen infrared (IR) spectroscopy oxidation oxygen plasma Plasma physics Plasma temperature Spectrum analysis Substrates Surface treatment Temperature Temperature measurement Thin films |
| title | Surface Modification of DLC Film Due to Oxygen-Plasma Exposure, Observed by IR Absorption Spectroscopy in Multiple-Internal-Reflection Geometry |
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