Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators Using Enhanced Series Tuning Technique

This paper reports on the demonstration of series tuning for lateral micromechanical oscillators and its application for electronic temperature compensation of piezoelectric lateral bulk acoustic resonator (LBAR) micromechanical oscillators. Two aluminum nitride-on-silicon (AlN-on-Si) piezoelectric...

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Veröffentlicht in:	IEEE journal of solid-state circuits 2012-06, Vol.47 (6), p.1381-1393
Hauptverfasser:	Lavasani, H. M., Wanling Pan, Harrington, B. P., Abdolvand, R., Ayazi, F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic wave devices, piezoelectric and piezoresistive devices Active inductor Applied sciences Circuit properties Design. Technologies. Operation analysis. Testing Dielectric, amorphous and glass solid devices Digital broadcasting Electric, optical and optoelectronic circuits Electronic circuits electronic frequency tuning Electronics Exact sciences and technology Integrated circuits MEMS micromechanical oscillator micromechanical resonator negative capacitor negative impedance converter Noise Oscillators Oscillators, resonators, synthetizers parasitic cancellation Parasitic capacitance Phase noise piezoelectric resonator reference oscillator Resonant frequency Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices series tuning sustaining amplifier temperature compensation Temperature distribution Tuning tuning enhancement
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