A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems

This paper presents a laboratory prototype of an instrument developed for electromechanical characterization of capacitive micro- and nanoelectromechanical systems (M/NEMS). The instrument aims at filling the gap between commercial electrical instrumentation (impedance meters) and optical instrument...

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Veröffentlicht in:	IEEE transactions on instrumentation and measurement 2012-07, Vol.61 (7), p.2012-2021
Hauptverfasser:	Buffa, C., Tocchio, A., Langfelder, G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Capacitance Capacitance measurement Capacitive microelectromechanical systems (MEMS) Detection Devices Dynamics Frequency measurement Impedance Instrumentation Instruments magnetometers Measuring instruments MEMS reliability Meters Nanoelectromechanical systems Noise Sensors
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