Micro Thermoelectric Generators

In recent years, thermoelectric energy conversion has experienced a legendary renaissance. This promising technology has a high potential to contribute to the need of energy sustainability and autonomous power sources for a broad variety of electronic devices. The chapter Micro thermoelectric generators provides a comprehensive overview of the current landscape of micro thermoelectric energy harvesters in the following subchapters: introduction, classification of micro thermoelectric generators (microTEGs), general considerations, micro device technologies, and applications of complete systems. MicroTEGs are categorized regarding fabrication technologies and materials, geometries of their thermocouples, and principle configurations based on the orientation of the heat flow through the devices and their packaging. Thermal and electrical design principles are briefly considered before various technological approaches are introducedon a component level using different material systems and fabricating techniques for micro devices. Many of these technologies are still in research, reflecting numerous and diverse activities in recent years. These include microTEG structures made mainly from bismuth telluride type materials by ECD, CVD, PVD, screen printing, dispenser printing, thermal co‐evaporation, and miniaturized bulk technology, as well as CMOS technology. More advanced and commercialized micro technologies for the application of V 2 VI 3 ‐compounds are presented, such as developed and applied by Laird, Micropelt, and Thermogen. Several selected industrial and wearables applications of complete systems are addressed, emphasizing the importance of the application‐specific thermal design of microTEG systems for maximum power generation.