Auto-calibrated potential map drawing equipment and its application to characterization of plasma-coupled devices

By utilizing the voltage contrast mode observed in a scanning electron microscope, the authors have fabricated equipment which they call auto-calibrated potential map drawing equipment (AP-MADE). This equipment can be used to observe the two-dimensional potential distribution on a semiconductor devi...

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Veröffentlicht in:	IEEE transactions on electron devices 1986-02, Vol.33 (2), p.192-197
Hauptverfasser:	Tamama, T., Kuji, N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Charge transfer devices Electronics Exact sciences and technology Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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