Dynamics and control of the Czochralski process: I. Modelling and dynamic characterization

A nonlinear dynamic model of the Czochralski process, valid throughout the batch growth cycle is derived for use in designing an improved process controller. The model is a lumped element representation of the major system components, and simulates the dynamic system response to disturbances and sys...

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Veröffentlicht in:	Journal of crystal growth 1987, Vol.84 (4), p.647-668
Hauptverfasser:	Gevelber, Michael A., Stephanopoulos, George
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of crystal growth physics of crystal growth Physics Theory and models of crystal growth physics of crystal growth, crystal morphology and orientation
Online-Zugang:	Volltext
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