Lithographic processing of polymers using plasma-generated electron beams

Pattern definition in polymer films is achieved using electron beams generated in soft vacuum (0.05-0.50 torr) glow discharges either on a continuous or a pulsed (20-100 ns) basis. With the continuous-mode electron beam, 7- mu m transmission mask features are replicated in both polymethyl methacryla...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	IEEE transactions on plasma science 1990-04, Vol.18 (2), p.198-209
Hauptverfasser:	Li, L., Krishnaswamy, J., Yu, Z., Collins, G.J., Hiraoka, H., Caolo, M.A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electron beams Exact sciences and technology Glow discharges Microelectronics Physical properties Plasma applications Plasma materials processing Plasma temperature Polyimides Polymer films Polymer industry, paints, wood Properties and testing Pulse generation Radiation influence Resists Technology of polymers
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!