Thermal instaiblity of the TiSi2/Si structure: impurity effects

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Hauptverfasser: OGAWA, S, YOSHIDA, T, KOUZAKI, T, OKUDA, S, TSUKAMOTO, K
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container_volume 41-42
creator OGAWA, S
YOSHIDA, T
KOUZAKI, T
OKUDA, S
TSUKAMOTO, K
description
format Conference Proceeding
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identifier ISSN: 0169-4332
ispartof Applied surface science, 1989, Vol.41-42 (1-4), p.290-295
issn 0169-4332
1873-5584
language eng
recordid cdi_pascalfrancis_primary_6719636
source Elsevier ScienceDirect Journals
subjects Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
title Thermal instaiblity of the TiSi2/Si structure: impurity effects
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