Infrared and raman spectroscopy of a-Si, Se: H alloys prepared by r.f. glow discharge
Hydrogenated amorphous silicon-selenium alloy thin films were grown by capacitively coupled radio frequency glow discharge decomposition of (SiH 4 + He) and (H 2 Se + He) gas mixtures. Infrared and Raman measurements were performed to probe the structure of the material. In addition to the Si-H indu...
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Veröffentlicht in: | Philosophical magazine. B, Physics of condensed matter. Structural, electronic, optical, and magnetic properties. Physics of condensed matter. Structural, electronic, optical, and magnetic properties., 1992-08, Vol.66 (2), p.211-218 |
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