Ellipsometrical determination of the optical constants of gold in the vacuum ultraviolet region

An ellipsometer has been designed and constructed for use in the vacuum ultraviolet region. To test the performance of the ellipsometer, the optical constants of Au were determined in the energy region 15–28 eV. The theoretical background and the experimental procedures of our ellipsometer are descr...

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Veröffentlicht in:	Review of Scientific Instruments 1992-01, Vol.63 (1), p.1450-1453
Hauptverfasser:	Kandaka, Noriaki, Yuri, Masatada, Fukutani, Hirohito, Koide, Tsuneharu, Shidara, Tetsuo
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Optical instruments, equipment and techniques Physics Polarimeters and ellipsometers
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	An ellipsometer has been designed and constructed for use in the vacuum ultraviolet region. To test the performance of the ellipsometer, the optical constants of Au were determined in the energy region 15–28 eV. The theoretical background and the experimental procedures of our ellipsometer are described.
ISSN:	0034-6748 1089-7623
DOI:	10.1063/1.1143040