A one-dimensional piezoelectric-driven inertial micropositioner with vertical capabilities

We have developed a novel piezoelectric-based linear inertial slider to achieve remote micropositioning in any orientation. It is particularly suitable for SPM in cryogenic and ultra-high vacuum environments and the simple, coaxial design results in a rigid structure. Speeds of up to 2 mm s super(-1...

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Veröffentlicht in:	Measurement science & technology 1993-04, Vol.4 (4), p.535-537
Hauptverfasser:	Woodburn, C N, McKinnon, A W, Roberts, D A, Taylor, M E, Welland, M E
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics
Online-Zugang:	Volltext
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