Mechanistic study of silicon etching in HF-KBrI3-H2O solution

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Veröffentlicht in:	Journal of the Electrochemical Society 1993, Vol.140 (5), p.1453-1458
Hauptverfasser:	YOUNG HUN SEO, KEE SUK NAHM, KEE BANG LEE
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Mechanical and acoustical properties adhesion Physics Solid surfaces and solid-solid interfaces Solid-fluid interfaces Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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issn	0013-4651 1945-7111
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source	IOP Publishing Journals
subjects	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Mechanical and acoustical properties adhesion Physics Solid surfaces and solid-solid interfaces Solid-fluid interfaces Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
title	Mechanistic study of silicon etching in HF-KBrI3-H2O solution
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