Auger electron spectroscopy of compounds in the Si-Ti-C system: Characterization of Si-Ti-C multiphased materials obtained by CVD

Auger peak positions and line shapes analyses of the Si LVV, Si KLL, C KVV and Ti LMM transitions for reference compounds: Ti, Si, SiC, TiC, TiC 0.72, TiSi 2, Ti 5Si 3(C) and Ti 3SiC 2, belonging to the ternary Si-Ti-C system have been performed. The results show that there are sufficient difference...

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Veröffentlicht in:	Surface science 1993-04, Vol.286 (1), p.82-91
Hauptverfasser:	Maline, M., Ducarroir, M., Teyssandier, F., Hillel, R., Berjoan, R., Van Loo, F.J.J., Wakelkamp, W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Electron and ion emission by liquids and solids impact phenomena Electron impact: auger emission Exact sciences and technology Impact phenomena (including electron spectra and sputtering) Physics
Online-Zugang:	Volltext
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