Auger electron spectroscopy of compounds in the Si-Ti-C system: Characterization of Si-Ti-C multiphased materials obtained by CVD
Auger peak positions and line shapes analyses of the Si LVV, Si KLL, C KVV and Ti LMM transitions for reference compounds: Ti, Si, SiC, TiC, TiC 0.72, TiSi 2, Ti 5Si 3(C) and Ti 3SiC 2, belonging to the ternary Si-Ti-C system have been performed. The results show that there are sufficient difference...
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| Veröffentlicht in: | Surface science 1993-04, Vol.286 (1), p.82-91 |
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| container_title | Surface science |
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| creator | Maline, M. Ducarroir, M. Teyssandier, F. Hillel, R. Berjoan, R. Van Loo, F.J.J. Wakelkamp, W. |
| description | Auger peak positions and line shapes analyses of the Si LVV, Si KLL, C KVV and Ti LMM transitions for reference compounds: Ti, Si, SiC, TiC, TiC
0.72, TiSi
2, Ti
5Si
3(C) and Ti
3SiC
2, belonging to the ternary Si-Ti-C system have been performed. The results show that there are sufficient differences in Auger peak positions and line shapes to allow compounds identifications. The Auger line shapes of the CKVV transitions for Ti
3SiC
2 and Ti
0.57Si
0.33C
0.1 (carbon solid solution in Ti
5Si
3) were found to be characteristic of carbon bonded to titanium. The Ti L
3M
23M
45 transition was found to be very sensitive to changes in the nature of the compounds. The spectra recorded for the reference compounds were used to characterize Si-Ti-C multiphased materials obtained by CVD. SiC-X (X = TiSi
2,Ti
3SiC
2, TiC + C) mixtures were identified. |
| doi_str_mv | 10.1016/0039-6028(93)90558-2 |
| format | Article |
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0.72, TiSi
2, Ti
5Si
3(C) and Ti
3SiC
2, belonging to the ternary Si-Ti-C system have been performed. The results show that there are sufficient differences in Auger peak positions and line shapes to allow compounds identifications. The Auger line shapes of the CKVV transitions for Ti
3SiC
2 and Ti
0.57Si
0.33C
0.1 (carbon solid solution in Ti
5Si
3) were found to be characteristic of carbon bonded to titanium. The Ti L
3M
23M
45 transition was found to be very sensitive to changes in the nature of the compounds. The spectra recorded for the reference compounds were used to characterize Si-Ti-C multiphased materials obtained by CVD. SiC-X (X = TiSi
2,Ti
3SiC
2, TiC + C) mixtures were identified.</description><identifier>ISSN: 0039-6028</identifier><identifier>EISSN: 1879-2758</identifier><identifier>DOI: 10.1016/0039-6028(93)90558-2</identifier><identifier>CODEN: SUSCAS</identifier><language>eng</language><publisher>Lausanne: Elsevier B.V</publisher><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Electron and ion emission by liquids and solids; impact phenomena ; Electron impact: auger emission ; Exact sciences and technology ; Impact phenomena (including electron spectra and sputtering) ; Physics</subject><ispartof>Surface science, 1993-04, Vol.286 (1), p.82-91</ispartof><rights>1993</rights><rights>1993 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/0039-6028(93)90558-2$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3550,27924,27925,45995</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=4676045$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Maline, M.</creatorcontrib><creatorcontrib>Ducarroir, M.</creatorcontrib><creatorcontrib>Teyssandier, F.</creatorcontrib><creatorcontrib>Hillel, R.</creatorcontrib><creatorcontrib>Berjoan, R.</creatorcontrib><creatorcontrib>Van Loo, F.J.J.</creatorcontrib><creatorcontrib>Wakelkamp, W.</creatorcontrib><title>Auger electron spectroscopy of compounds in the Si-Ti-C system: Characterization of Si-Ti-C multiphased materials obtained by CVD</title><title>Surface science</title><description>Auger peak positions and line shapes analyses of the Si LVV, Si KLL, C KVV and Ti LMM transitions for reference compounds: Ti, Si, SiC, TiC, TiC
0.72, TiSi
2, Ti
5Si
3(C) and Ti
3SiC
2, belonging to the ternary Si-Ti-C system have been performed. The results show that there are sufficient differences in Auger peak positions and line shapes to allow compounds identifications. The Auger line shapes of the CKVV transitions for Ti
3SiC
2 and Ti
0.57Si
0.33C
0.1 (carbon solid solution in Ti
5Si
3) were found to be characteristic of carbon bonded to titanium. The Ti L
3M
23M
45 transition was found to be very sensitive to changes in the nature of the compounds. The spectra recorded for the reference compounds were used to characterize Si-Ti-C multiphased materials obtained by CVD. SiC-X (X = TiSi
2,Ti
3SiC
2, TiC + C) mixtures were identified.</description><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Electron and ion emission by liquids and solids; impact phenomena</subject><subject>Electron impact: auger emission</subject><subject>Exact sciences and technology</subject><subject>Impact phenomena (including electron spectra and sputtering)</subject><subject>Physics</subject><issn>0039-6028</issn><issn>1879-2758</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1993</creationdate><recordtype>article</recordtype><recordid>eNo9kE1LxDAQhoMouK7-Aw85eNBDNUmbtPEgLPUTFjy4eg1pMnUj_SLpCvXmP7fdVecyw8szw_AgdErJJSVUXBESy0gQlp3L-EISzrOI7aEZzVIZsZRn-2j2jxyioxA-yFiJ5DP0vdi8g8dQgel92-DQbYdg2m7AbYlNW3ftprEBuwb3a8AvLlq5KMdhCD3U1zhfa69ND9596d6NF8alP6beVL3r1jqAxbWeGF0F3Ba9ds0YFQPO326P0UE5xnDy2-fo9f5ulT9Gy-eHp3yxjIDFaR8BLy2jcakFKXjBOOdGpAlIy4U1idDEJmVZGC4lLzLBgFINGWS0sCwuwJB4js52dzsdjK5Krxvjguq8q7UfVCJSQRI-Yjc7DMZfPh14FYyDxoB1flSjbOsUJWryriapapKqZKy23hWLfwC1iHhp</recordid><startdate>19930420</startdate><enddate>19930420</enddate><creator>Maline, M.</creator><creator>Ducarroir, M.</creator><creator>Teyssandier, F.</creator><creator>Hillel, R.</creator><creator>Berjoan, R.</creator><creator>Van Loo, F.J.J.</creator><creator>Wakelkamp, W.</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope></search><sort><creationdate>19930420</creationdate><title>Auger electron spectroscopy of compounds in the Si-Ti-C system: Characterization of Si-Ti-C multiphased materials obtained by CVD</title><author>Maline, M. ; Ducarroir, M. ; Teyssandier, F. ; Hillel, R. ; Berjoan, R. ; Van Loo, F.J.J. ; Wakelkamp, W.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-e237t-e5fd213fa60b5b2555c674e9d56dc46a0d4ffbc5995b862e11ae8e81bd23bec03</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1993</creationdate><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Electron and ion emission by liquids and solids; impact phenomena</topic><topic>Electron impact: auger emission</topic><topic>Exact sciences and technology</topic><topic>Impact phenomena (including electron spectra and sputtering)</topic><topic>Physics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Maline, M.</creatorcontrib><creatorcontrib>Ducarroir, M.</creatorcontrib><creatorcontrib>Teyssandier, F.</creatorcontrib><creatorcontrib>Hillel, R.</creatorcontrib><creatorcontrib>Berjoan, R.</creatorcontrib><creatorcontrib>Van Loo, F.J.J.</creatorcontrib><creatorcontrib>Wakelkamp, W.</creatorcontrib><collection>Pascal-Francis</collection><jtitle>Surface science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Maline, M.</au><au>Ducarroir, M.</au><au>Teyssandier, F.</au><au>Hillel, R.</au><au>Berjoan, R.</au><au>Van Loo, F.J.J.</au><au>Wakelkamp, W.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Auger electron spectroscopy of compounds in the Si-Ti-C system: Characterization of Si-Ti-C multiphased materials obtained by CVD</atitle><jtitle>Surface science</jtitle><date>1993-04-20</date><risdate>1993</risdate><volume>286</volume><issue>1</issue><spage>82</spage><epage>91</epage><pages>82-91</pages><issn>0039-6028</issn><eissn>1879-2758</eissn><coden>SUSCAS</coden><abstract>Auger peak positions and line shapes analyses of the Si LVV, Si KLL, C KVV and Ti LMM transitions for reference compounds: Ti, Si, SiC, TiC, TiC
0.72, TiSi
2, Ti
5Si
3(C) and Ti
3SiC
2, belonging to the ternary Si-Ti-C system have been performed. The results show that there are sufficient differences in Auger peak positions and line shapes to allow compounds identifications. The Auger line shapes of the CKVV transitions for Ti
3SiC
2 and Ti
0.57Si
0.33C
0.1 (carbon solid solution in Ti
5Si
3) were found to be characteristic of carbon bonded to titanium. The Ti L
3M
23M
45 transition was found to be very sensitive to changes in the nature of the compounds. The spectra recorded for the reference compounds were used to characterize Si-Ti-C multiphased materials obtained by CVD. SiC-X (X = TiSi
2,Ti
3SiC
2, TiC + C) mixtures were identified.</abstract><cop>Lausanne</cop><cop>Amsterdam</cop><cop>New York, NY</cop><pub>Elsevier B.V</pub><doi>10.1016/0039-6028(93)90558-2</doi><tpages>10</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0039-6028 |
| ispartof | Surface science, 1993-04, Vol.286 (1), p.82-91 |
| issn | 0039-6028 1879-2758 |
| language | eng |
| recordid | cdi_pascalfrancis_primary_4676045 |
| source | Elsevier ScienceDirect Journals Complete |
| subjects | Condensed matter: electronic structure, electrical, magnetic, and optical properties Electron and ion emission by liquids and solids impact phenomena Electron impact: auger emission Exact sciences and technology Impact phenomena (including electron spectra and sputtering) Physics |
| title | Auger electron spectroscopy of compounds in the Si-Ti-C system: Characterization of Si-Ti-C multiphased materials obtained by CVD |
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