In situ sensitive measurement of stress in thin films

A method for the in situ measurement of mechanical stress in thin films deposited in a vacuum system is presented. The bending of the substrate, a measure for mechanical stress in the deposited layer, is detected by reflecting two parallel laser beams off the surface of the substrate and measuring t...

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Veröffentlicht in:	Review of scientific instruments 1992-05, Vol.63 (5), p.3143-3146
Hauptverfasser:	Leusink, G. J., Oosterlaken, T. G. M., Janssen, G. C. A. M., Radelaar, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Optical instruments, equipment and techniques Physics
Online-Zugang:	Volltext
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