Improved fluorinated hydrogenated amorphous silicon alloys prepared using the hot-plasma-box glow-discharge technique

The structural, optical and electrical properties of fluorinated hydrogenated amorphous silicon alloy thin films grown from a SiF 4 -SiH 4 -H 2 gas mixture in a new hot-plasma-box (HPB) glow-discharge reactor are reported. We observed that the-HPB technique provides almost four times better growth r...

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Veröffentlicht in:	Philosophical magazine. B, Physics of condensed matter. Structural, electronic, optical, and magnetic properties. Physics of condensed matter. Structural, electronic, optical, and magnetic properties., 1994-08, Vol.70 (2), p.263-276
Hauptverfasser:	Bhusari, D. M., Kumbhar, A. S., Kshirsagar, S. T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Conductivity of specific materials Disordered solids Electronic transport in condensed matter Exact sciences and technology Infrared and Raman spectra Infrared and raman spectra and scattering Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Photoconduction and photovoltaic effects Photoconduction and photovoltaic effects photodielectric effects Physics
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