Electrophysics of micromechanical comb actuators

A simple approximate theory is developed for the electrostatic forces operating in a micromechanical comb actuator. The comb drive is considered both without (for simplicity) and with an underlying ground plane. The forces are partitioned into local forces (electric fields confined to the cross-sect...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of microelectromechanical systems 1995-03, Vol.4 (1), p.49-59
Hauptverfasser:	Johnson, W.A., Warne, L.K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Applied sciences Conformal mapping Costs Electrostatics Exact sciences and technology Fingers Geometry Integrated circuit manufacture Magnetic separation Mass production Mechanical engineering. Machine design Micromechanical devices Precision engineering, watch making
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!