TiN/TiSi2 formation using TiNx layer and its feasibilities in ULSI
Gespeichert in:
| Veröffentlicht in: | Japanese journal of applied physics 1995, Vol.34 (2B), p.982-986 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 986 |
|---|---|
| container_issue | 2B |
| container_start_page | 982 |
| container_title | Japanese journal of applied physics |
| container_volume | 34 |
| creator | JEONG SOO BYUN CHANG REOL KIM KWAN GOO RHA JAE JEONG KIM WOO SHIK KIM |
| description | |
| doi_str_mv | 10.1143/JJAP.34.982 |
| format | Article |
| fullrecord | <record><control><sourceid>pascalfrancis</sourceid><recordid>TN_cdi_pascalfrancis_primary_3471280</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>3471280</sourcerecordid><originalsourceid>FETCH-LOGICAL-j305t-529897896b13bc4e7f111e05a3fe1fea48652684cf108dccc8e1a98d4ea362cf3</originalsourceid><addsrcrecordid>eNotj11LwzAYRoMoWKdX_oFceNsub76aXM6hc6OosO56pGki7-i60VRw_96CXj0cDhx4CHkEVgBIMd9sFp-FkIU1_IpkIGSZS6bVNckY45BLy_ktuUvpMKFWEjLyXOP7vMYtchpPw9GNeOrpd8L-i07mh3buEgbq-pbimGgMLmGDHY4YEsWe7qrt-p7cRNel8PC_M7J7famXb3n1sVovF1V-EEyNueLW2NJY3YBovAxlBIDAlBMxwBSWRiuujfQRmGm99yaAs6aVwQnNfRQz8vTXPbvkXRcH13tM-_OARzdc9tNZ4IaJXyK3Stg</addsrcrecordid><sourcetype>Index Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>TiN/TiSi2 formation using TiNx layer and its feasibilities in ULSI</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>JEONG SOO BYUN ; CHANG REOL KIM ; KWAN GOO RHA ; JAE JEONG KIM ; WOO SHIK KIM</creator><creatorcontrib>JEONG SOO BYUN ; CHANG REOL KIM ; KWAN GOO RHA ; JAE JEONG KIM ; WOO SHIK KIM</creatorcontrib><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.1143/JJAP.34.982</identifier><identifier>CODEN: JJAPA5</identifier><language>eng</language><publisher>Tokyo: Japanese journal of applied physics</publisher><subject>Condensed matter: structure, mechanical and thermal properties ; Diffusion; interface formation ; Exact sciences and technology ; Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties ; Physics ; Solid surfaces and solid-solid interfaces ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><ispartof>Japanese journal of applied physics, 1995, Vol.34 (2B), p.982-986</ispartof><rights>1995 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>309,310,776,780,785,786,4036,4037,23909,23910,25118,27902</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=3471280$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>JEONG SOO BYUN</creatorcontrib><creatorcontrib>CHANG REOL KIM</creatorcontrib><creatorcontrib>KWAN GOO RHA</creatorcontrib><creatorcontrib>JAE JEONG KIM</creatorcontrib><creatorcontrib>WOO SHIK KIM</creatorcontrib><title>TiN/TiSi2 formation using TiNx layer and its feasibilities in ULSI</title><title>Japanese journal of applied physics</title><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Diffusion; interface formation</subject><subject>Exact sciences and technology</subject><subject>Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties</subject><subject>Physics</subject><subject>Solid surfaces and solid-solid interfaces</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1995</creationdate><recordtype>article</recordtype><recordid>eNotj11LwzAYRoMoWKdX_oFceNsub76aXM6hc6OosO56pGki7-i60VRw_96CXj0cDhx4CHkEVgBIMd9sFp-FkIU1_IpkIGSZS6bVNckY45BLy_ktuUvpMKFWEjLyXOP7vMYtchpPw9GNeOrpd8L-i07mh3buEgbq-pbimGgMLmGDHY4YEsWe7qrt-p7cRNel8PC_M7J7famXb3n1sVovF1V-EEyNueLW2NJY3YBovAxlBIDAlBMxwBSWRiuujfQRmGm99yaAs6aVwQnNfRQz8vTXPbvkXRcH13tM-_OARzdc9tNZ4IaJXyK3Stg</recordid><startdate>1995</startdate><enddate>1995</enddate><creator>JEONG SOO BYUN</creator><creator>CHANG REOL KIM</creator><creator>KWAN GOO RHA</creator><creator>JAE JEONG KIM</creator><creator>WOO SHIK KIM</creator><general>Japanese journal of applied physics</general><scope>IQODW</scope></search><sort><creationdate>1995</creationdate><title>TiN/TiSi2 formation using TiNx layer and its feasibilities in ULSI</title><author>JEONG SOO BYUN ; CHANG REOL KIM ; KWAN GOO RHA ; JAE JEONG KIM ; WOO SHIK KIM</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-j305t-529897896b13bc4e7f111e05a3fe1fea48652684cf108dccc8e1a98d4ea362cf3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1995</creationdate><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Diffusion; interface formation</topic><topic>Exact sciences and technology</topic><topic>Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties</topic><topic>Physics</topic><topic>Solid surfaces and solid-solid interfaces</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>JEONG SOO BYUN</creatorcontrib><creatorcontrib>CHANG REOL KIM</creatorcontrib><creatorcontrib>KWAN GOO RHA</creatorcontrib><creatorcontrib>JAE JEONG KIM</creatorcontrib><creatorcontrib>WOO SHIK KIM</creatorcontrib><collection>Pascal-Francis</collection><jtitle>Japanese journal of applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>JEONG SOO BYUN</au><au>CHANG REOL KIM</au><au>KWAN GOO RHA</au><au>JAE JEONG KIM</au><au>WOO SHIK KIM</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>TiN/TiSi2 formation using TiNx layer and its feasibilities in ULSI</atitle><jtitle>Japanese journal of applied physics</jtitle><date>1995</date><risdate>1995</risdate><volume>34</volume><issue>2B</issue><spage>982</spage><epage>986</epage><pages>982-986</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><coden>JJAPA5</coden><cop>Tokyo</cop><pub>Japanese journal of applied physics</pub><doi>10.1143/JJAP.34.982</doi><tpages>5</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0021-4922 |
| ispartof | Japanese journal of applied physics, 1995, Vol.34 (2B), p.982-986 |
| issn | 0021-4922 1347-4065 |
| language | eng |
| recordid | cdi_pascalfrancis_primary_3471280 |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Condensed matter: structure, mechanical and thermal properties Diffusion interface formation Exact sciences and technology Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Physics Solid surfaces and solid-solid interfaces Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) |
| title | TiN/TiSi2 formation using TiNx layer and its feasibilities in ULSI |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-30T19%3A13%3A51IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-pascalfrancis&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=TiN/TiSi2%20formation%20using%20TiNx%20layer%20and%20its%20feasibilities%20in%20ULSI&rft.jtitle=Japanese%20journal%20of%20applied%20physics&rft.au=JEONG%20SOO%20BYUN&rft.date=1995&rft.volume=34&rft.issue=2B&rft.spage=982&rft.epage=986&rft.pages=982-986&rft.issn=0021-4922&rft.eissn=1347-4065&rft.coden=JJAPA5&rft_id=info:doi/10.1143/JJAP.34.982&rft_dat=%3Cpascalfrancis%3E3471280%3C/pascalfrancis%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |