Spatiotemporal analysis of the double layer formation in hydrogen radio frequency discharges

RF discharges at 13.56 MHz in pure H\+v\2\-v\ and CH\+v\4\-v\-SiH\+v\4\-v\ mixtures highly diluted in H\+v\2\-v\ were investigated by spatially and spatiotemporally resolved emission spectroscopy. Spatial emission profiles of the excited species exhibit double layers near the electrodes. Spatiotempo...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 1995-03, Vol.28 (3), p.500-507
Hauptverfasser:	Leroy, O, Stratil, P, Perrin, J, Jolly, J, Belenguer, P
Format:	Artikel
Sprache:	eng
Schlagworte:	Electric discharges Exact sciences and technology High-frequency discharges Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges
Online-Zugang:	Volltext
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