High-Throughput Electron Beam Direct Writing of VIA Layers by Character Projection with One-Dimensional VIA Characters : VLSI Design and CAD Algorithms

Bibliographische Detailangaben

Veröffentlicht in:	IEICE transactions on fundamentals of electronics, communications and computer sciences communications and computer sciences, 2013, Vol.96 (12), p.2458-2466
Hauptverfasser:	IKENO, Rimon, MARUYAMA, Takashi, KOMATSU, Satoshi, IIZUKA, Tetsuya, IKEDA, Makoto, ASADA, Kunihiro
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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