Ultra-high-ohmic microstripline resistors for Coulomb blockade devices

In this paper, we report on the fabrication and low-temperature characterization of ultra-high-ohmic microstripline resistors made of a thin film of weakly oxidized titanium. Nearly linear voltage-current characteristics were measured at temperatures down to T ∼ 20 mK for films with sheet resistivit...

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Veröffentlicht in:	Nanotechnology 2013-06, Vol.24 (23), p.235201-235201
1. Verfasser:	Lotkhov, Sergey V
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Blocking Coulomb friction Electrical resistivity Electronic equipment and fabrication. Passive components, printed wiring boards, connectics Electronics Exact sciences and technology Nanotechnology Resistors Thin films Titanium
Online-Zugang:	Volltext
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