Nondestructive Inspection of Buried Channels and Cavities in Silicon

Microelectromechanical systems and microfluidic devices feature buried channels, cavities, and other embedded microstructures. These features are usually examined by breaking the wafer and by imaging the revealed cross section. We propose a nondestructive technique to evaluate the shape and surface...

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Veröffentlicht in:	Journal of microelectromechanical systems 2013-04, Vol.22 (2), p.438-442
Hauptverfasser:	Kassamakov, I., Grigoras, K., Heikkinen, V., Hanhijarvi, K., Aaltonen, J., Franssila, S., Haeggstrom, E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied fluid mechanics Applied sciences Cavity resonators Educational institutions Electronics Exact sciences and technology Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) Infrared (IR) imaging Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Micro- and nanoelectromechanical devices (mems/nems) microelectromechanical systems Micromechanical devices and systems Microscopy Optical interferometry Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Silicon thickness measurement
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