Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensation

This work presents the simultaneous fabrication of ambient relative humidity (RH) and temperature sensors arrays, inkjet-printed on flexible substrates and subsequently encapsulated at foil level. These sensors are based on planar interdigitated capacitors with an inkjet-printed sensing layer and me...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2013-02, Vol.23 (2), p.25012-11
Hauptverfasser:	Molina-Lopez, F, Quintero, A Vásquez, Mattana, G, Briand, D, de Rooij, N F
Format:	Artikel
Sprache:	eng
Schlagworte:	Compensation Electrodeposition Encapsulation Exact sciences and technology flexible encapsulation foil level Foils General equipment and techniques humidity sensor inkjet-printing Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Relative humidity Sensor arrays Sensors Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Temperature sensors thermal compensation
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