SU-8 2002 Surface Micromachined Deformable Membrane Mirrors

This paper describes two surface micromachining processes, i.e., one using a wet-etch release and the other using a dry-etch release, to create deformable membrane mirrors made from a thin film of low-stress SU-8 2002. The mirrors are designed for electronic focus and aberration control in imaging s...

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Veröffentlicht in:	Journal of microelectromechanical systems 2013-02, Vol.22 (1), p.94-106
Hauptverfasser:	Lukes, S. J., Dickensheets, D. L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Deformable mirror Etching Exact sciences and technology focus control hbox{XeF}_{2} Instruments, apparatus, components and techniques common to several branches of physics and astronomy Lenses Mechanical instruments, equipment and techniques microelectromechanical systems (MEMS) Micromechanical devices and systems Mirrors Optical imaging Physics Silicon Stress SU-8 2002 tetramethylammonium hydroxide (TMAH) variable-power lens
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