SU-8 2002 Surface Micromachined Deformable Membrane Mirrors
This paper describes two surface micromachining processes, i.e., one using a wet-etch release and the other using a dry-etch release, to create deformable membrane mirrors made from a thin film of low-stress SU-8 2002. The mirrors are designed for electronic focus and aberration control in imaging s...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2013-02, Vol.22 (1), p.94-106 |
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| container_end_page | 106 |
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| container_title | Journal of microelectromechanical systems |
| container_volume | 22 |
| creator | Lukes, S. J. Dickensheets, D. L. |
| description | This paper describes two surface micromachining processes, i.e., one using a wet-etch release and the other using a dry-etch release, to create deformable membrane mirrors made from a thin film of low-stress SU-8 2002. The mirrors are designed for electronic focus and aberration control in imaging systems, and exhibit a large range of motion and high optical quality. The processes result in free-standing membrane mirrors with in-plane film stress as low as 12.5 MPa while attaining well-defined lithographic features as small as 3 μm in a 2.5-μm-thick film. We achieved a maximum deflection of 14.8 μm for a 3-mm × 4.24-mm elliptical boundary mirror, limited by electrostatic pull-in. Using a 3-mm × 4.24-mm mirror, which is designed for operation with a circular beam at 45° incidence angle, we demonstrate focus control while compensating spherical aberration in an optical microscope over a depth of 137 μm using a 50× 0.4-NA objective lens. |
| doi_str_mv | 10.1109/JMEMS.2012.2215010 |
| format | Article |
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Using a 3-mm × 4.24-mm mirror, which is designed for operation with a circular beam at 45° incidence angle, we demonstrate focus control while compensating spherical aberration in an optical microscope over a depth of 137 μm using a 50× 0.4-NA objective lens.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2012.2215010</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Deformable mirror ; Etching ; Exact sciences and technology ; focus control ; hbox{XeF}_{2} ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Lenses ; Mechanical instruments, equipment and techniques ; microelectromechanical systems (MEMS) ; Micromechanical devices and systems ; Mirrors ; Optical imaging ; Physics ; Silicon ; Stress ; SU-8 2002 ; tetramethylammonium hydroxide (TMAH) ; variable-power lens</subject><ispartof>Journal of microelectromechanical systems, 2013-02, Vol.22 (1), p.94-106</ispartof><rights>2014 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c363t-9cabf2fb5c47bbf362d33a2c4e799c2e1455cc55564ab25ed0d57723dc987a963</citedby><cites>FETCH-LOGICAL-c363t-9cabf2fb5c47bbf362d33a2c4e799c2e1455cc55564ab25ed0d57723dc987a963</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6304898$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6304898$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=26898787$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Lukes, S. J.</creatorcontrib><creatorcontrib>Dickensheets, D. L.</creatorcontrib><title>SU-8 2002 Surface Micromachined Deformable Membrane Mirrors</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>This paper describes two surface micromachining processes, i.e., one using a wet-etch release and the other using a dry-etch release, to create deformable membrane mirrors made from a thin film of low-stress SU-8 2002. The mirrors are designed for electronic focus and aberration control in imaging systems, and exhibit a large range of motion and high optical quality. The processes result in free-standing membrane mirrors with in-plane film stress as low as 12.5 MPa while attaining well-defined lithographic features as small as 3 μm in a 2.5-μm-thick film. We achieved a maximum deflection of 14.8 μm for a 3-mm × 4.24-mm elliptical boundary mirror, limited by electrostatic pull-in. Using a 3-mm × 4.24-mm mirror, which is designed for operation with a circular beam at 45° incidence angle, we demonstrate focus control while compensating spherical aberration in an optical microscope over a depth of 137 μm using a 50× 0.4-NA objective lens.</description><subject>Deformable mirror</subject><subject>Etching</subject><subject>Exact sciences and technology</subject><subject>focus control</subject><subject>hbox{XeF}_{2}</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Lenses</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>microelectromechanical systems (MEMS)</subject><subject>Micromechanical devices and systems</subject><subject>Mirrors</subject><subject>Optical imaging</subject><subject>Physics</subject><subject>Silicon</subject><subject>Stress</subject><subject>SU-8 2002</subject><subject>tetramethylammonium hydroxide (TMAH)</subject><subject>variable-power lens</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9j0tPwzAQhC0EEqXwB-CSC8eU9foVixMq5aVGHELPke3YIqhpKhsO_HtcWvW0K803oxlCrinMKAV991Yv6maGQHGGSAVQOCETqjktgYrqNP8gVKmoUOfkIqUvAMp5JSfkvlmVVYEAWDQ_MRjni7p3cRyM--w3visefRjjYOw6C36w0Wx2RIxjTJfkLJh18leHOyWrp8XH_KVcvj-_zh-WpWOSfZfaGRswWOG4sjYwiR1jBh33SmuHnnIhnBNCSG4sCt9BJ5RC1jldKaMlmxLc5-ZeKUUf2m3sBxN_Wwrtbn77P7_dzW8P87Ppdm_amuTMOuTirk9HJ8oqp1cqczd7rvfeH2XJgGeA_QEmJGIH</recordid><startdate>20130201</startdate><enddate>20130201</enddate><creator>Lukes, S. J.</creator><creator>Dickensheets, D. L.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20130201</creationdate><title>SU-8 2002 Surface Micromachined Deformable Membrane Mirrors</title><author>Lukes, S. J. ; Dickensheets, D. L.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c363t-9cabf2fb5c47bbf362d33a2c4e799c2e1455cc55564ab25ed0d57723dc987a963</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Deformable mirror</topic><topic>Etching</topic><topic>Exact sciences and technology</topic><topic>focus control</topic><topic>hbox{XeF}_{2}</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Lenses</topic><topic>Mechanical instruments, equipment and techniques</topic><topic>microelectromechanical systems (MEMS)</topic><topic>Micromechanical devices and systems</topic><topic>Mirrors</topic><topic>Optical imaging</topic><topic>Physics</topic><topic>Silicon</topic><topic>Stress</topic><topic>SU-8 2002</topic><topic>tetramethylammonium hydroxide (TMAH)</topic><topic>variable-power lens</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lukes, S. J.</creatorcontrib><creatorcontrib>Dickensheets, D. L.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Lukes, S. J.</au><au>Dickensheets, D. L.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>SU-8 2002 Surface Micromachined Deformable Membrane Mirrors</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2013-02-01</date><risdate>2013</risdate><volume>22</volume><issue>1</issue><spage>94</spage><epage>106</epage><pages>94-106</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>This paper describes two surface micromachining processes, i.e., one using a wet-etch release and the other using a dry-etch release, to create deformable membrane mirrors made from a thin film of low-stress SU-8 2002. The mirrors are designed for electronic focus and aberration control in imaging systems, and exhibit a large range of motion and high optical quality. The processes result in free-standing membrane mirrors with in-plane film stress as low as 12.5 MPa while attaining well-defined lithographic features as small as 3 μm in a 2.5-μm-thick film. We achieved a maximum deflection of 14.8 μm for a 3-mm × 4.24-mm elliptical boundary mirror, limited by electrostatic pull-in. Using a 3-mm × 4.24-mm mirror, which is designed for operation with a circular beam at 45° incidence angle, we demonstrate focus control while compensating spherical aberration in an optical microscope over a depth of 137 μm using a 50× 0.4-NA objective lens.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2012.2215010</doi><tpages>13</tpages></addata></record> |
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| ispartof | Journal of microelectromechanical systems, 2013-02, Vol.22 (1), p.94-106 |
| issn | 1057-7157 1941-0158 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Deformable mirror Etching Exact sciences and technology focus control hbox{XeF}_{2} Instruments, apparatus, components and techniques common to several branches of physics and astronomy Lenses Mechanical instruments, equipment and techniques microelectromechanical systems (MEMS) Micromechanical devices and systems Mirrors Optical imaging Physics Silicon Stress SU-8 2002 tetramethylammonium hydroxide (TMAH) variable-power lens |
| title | SU-8 2002 Surface Micromachined Deformable Membrane Mirrors |
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