A Novel Micromachined Claw Probe for the Electrical Testing of Microsolder Ball

This paper presents a micromachined claw probe with electroplating nickel for microsolder ball electrical testing applications. The suspension claw structure consists of two bridges and four curved cantilevers, which have a flexible spring constant in a small region. The out-of-plane claw-probe unit...

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Veröffentlicht in:	Journal of microelectromechanical systems 2012-10, Vol.21 (5), p.1022-1031
Hauptverfasser:	Tsou, Chingfu, Lai, Tengshian, Huang, Chenghan
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Arrays Claw probe Claws Deflection Electrical and electronic components, instruments and techniques Electronics electroplated nickel Electroplating Exact sciences and technology Force Instruments, apparatus, components and techniques common to several branches of physics and astronomy Micromachining Micromechanics microsolder ball Nickel Physics Probes Residual stresses Semiconductors Silicon Strokes Studies Testing Testing, measurement, noise and reliability
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