The energy distribution function of ions impinging on nanoparticles in a collisional low-pressure plasma
A self-consistent particle-in-cell/Monte Carlo collision (PIC/MCC) simulation is used to calculate the ion energy distribution (IED) function of ions impinging on the surface of nanoparticles in low-pressure argon plasmas. The computation includes the effects of resonant charge-exchange and elastic...
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| Veröffentlicht in: | Plasma sources science & technology 2012-06, Vol.21 (3), p.35002-1-8 |
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| creator | Galli, Federico Mamunuru, Meenakshi Kortshagen, Uwe R |
| description | A self-consistent particle-in-cell/Monte Carlo collision (PIC/MCC) simulation is used to calculate the ion energy distribution (IED) function of ions impinging on the surface of nanoparticles in low-pressure argon plasmas. The computation includes the effects of resonant charge-exchange and elastic collisions between ions and neutrals through a Monte Carlo null-collision method and considers both Maxwellian and non-Maxwellian electron energy distributions. Results show a strong dependence of the IED on pressure. Intermediate pressures yield a remarkable reduction in the average ion energy and an enhancement in the ion flux to the surface of the nanoparticles. |
| doi_str_mv | 10.1088/0963-0252/21/3/035002 |
| format | Article |
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The computation includes the effects of resonant charge-exchange and elastic collisions between ions and neutrals through a Monte Carlo null-collision method and considers both Maxwellian and non-Maxwellian electron energy distributions. Results show a strong dependence of the IED on pressure. 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Intermediate pressures yield a remarkable reduction in the average ion energy and an enhancement in the ion flux to the surface of the nanoparticles.</description><subject>Argon plasma</subject><subject>Computer simulation</subject><subject>Electron energy distribution</subject><subject>Exact sciences and technology</subject><subject>Mathematical analysis</subject><subject>Mathematical models</subject><subject>Monte Carlo methods</subject><subject>Nanoparticles</subject><subject>Particle in cell technique</subject><subject>Particle-in-cell method</subject><subject>Physics</subject><subject>Physics of gases, plasmas and electric discharges</subject><subject>Physics of plasmas and electric discharges</subject><subject>Plasma simulation</subject><issn>0963-0252</issn><issn>1361-6595</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNqFkE1rGzEQQEVoIG6SnxDQJdDL1vpYrXaPxbRpIZCLcxZjreQoyNJGs0vJv68cm1wLAzPMvJmBR8gdZ9856_s1GzrZMKHEWvC1XDOpGBMXZMVlx5tODeoLWX0yV-Qr4itjnPdCr8jL9sVRl1zZv9Mx4FzCbplDTtQvyX4U2dOakIbDFNK-Bq3NBClPUOZgo6ujRIHaHGPAikKkMf9tpuIQl-LoFAEPcEMuPUR0t-d8TZ5__dxufjePTw9_Nj8eGytVPzeD0xZ2bmeVlKNjXAAIK7TulRYextEPo2hH1immwGqpBy29Br_zvWKDdlJek2-nu1PJb4vD2RwCWhcjJJcXNLxte81Z17YVVSfUloxYnDdTCQco74YzczRrjtbM0ZoR3NTqw2zduz-_ALQQfYFkA34ui47xToi-cvzEhTyZ17yUqgb_c_sfHvyJUw</recordid><startdate>20120601</startdate><enddate>20120601</enddate><creator>Galli, Federico</creator><creator>Mamunuru, Meenakshi</creator><creator>Kortshagen, Uwe R</creator><general>IOP Publishing</general><general>Institute of Physics</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20120601</creationdate><title>The energy distribution function of ions impinging on nanoparticles in a collisional low-pressure plasma</title><author>Galli, Federico ; Mamunuru, Meenakshi ; Kortshagen, Uwe R</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c358t-9e7cabebc533de012aa2c2778572faddf9d24d06505ac737973f7afbf85097e33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Argon plasma</topic><topic>Computer simulation</topic><topic>Electron energy distribution</topic><topic>Exact sciences and technology</topic><topic>Mathematical analysis</topic><topic>Mathematical models</topic><topic>Monte Carlo methods</topic><topic>Nanoparticles</topic><topic>Particle in cell technique</topic><topic>Particle-in-cell method</topic><topic>Physics</topic><topic>Physics of gases, plasmas and electric discharges</topic><topic>Physics of plasmas and electric discharges</topic><topic>Plasma simulation</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Galli, Federico</creatorcontrib><creatorcontrib>Mamunuru, Meenakshi</creatorcontrib><creatorcontrib>Kortshagen, Uwe R</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Plasma sources science & technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Galli, Federico</au><au>Mamunuru, Meenakshi</au><au>Kortshagen, Uwe R</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>The energy distribution function of ions impinging on nanoparticles in a collisional low-pressure plasma</atitle><jtitle>Plasma sources science & technology</jtitle><stitle>PSST</stitle><addtitle>Plasma Sources Sci. Technol</addtitle><date>2012-06-01</date><risdate>2012</risdate><volume>21</volume><issue>3</issue><spage>35002</spage><epage>1-8</epage><pages>35002-1-8</pages><issn>0963-0252</issn><eissn>1361-6595</eissn><coden>PSTEEU</coden><abstract>A self-consistent particle-in-cell/Monte Carlo collision (PIC/MCC) simulation is used to calculate the ion energy distribution (IED) function of ions impinging on the surface of nanoparticles in low-pressure argon plasmas. The computation includes the effects of resonant charge-exchange and elastic collisions between ions and neutrals through a Monte Carlo null-collision method and considers both Maxwellian and non-Maxwellian electron energy distributions. Results show a strong dependence of the IED on pressure. 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| ispartof | Plasma sources science & technology, 2012-06, Vol.21 (3), p.35002-1-8 |
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| language | eng |
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| source | Institute of Physics Journals |
| subjects | Argon plasma Computer simulation Electron energy distribution Exact sciences and technology Mathematical analysis Mathematical models Monte Carlo methods Nanoparticles Particle in cell technique Particle-in-cell method Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma simulation |
| title | The energy distribution function of ions impinging on nanoparticles in a collisional low-pressure plasma |
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