Measurement of free radical kinetics in pulsed plasmas by UV and VUV absorption spectroscopy and by modulated beam mass spectrometry
This paper reviews recent progress in the development of time-resolved diagnostics to probe high-density pulsed plasma sources. We focus on time-resolved measurements of radicals' densities in the afterglow of pulsed discharges to provide useful information on production and loss mechanisms of...
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Veröffentlicht in: | Plasma sources science & technology 2012-04, Vol.21 (2), p.24006-1-9 |
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Sprache: | eng |
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