Preparation and properties of Mg0.2Zn0.8O:Al UV transparent conducting thin films deposited by RF magnetron sputtering at room temperature with rapid annealing : Zinc oxide

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Veröffentlicht in:Journal of materials science. Materials in electronics 2012, Vol.23 (2), p.403-407
Hauptverfasser: HUA WANG, ZHU HUANG, XU, Ji-Wen, LING YANG, ZHOU, Shang-Ju
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ZHU HUANG
XU, Ji-Wen
LING YANG
ZHOU, Shang-Ju
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subjects Annealing
Applied sciences
Cold working, work hardening
annealing, quenching, tempering, recovery, and recrystallization
textures
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Heat treatment
Materials science
Metals. Metallurgy
Methods of deposition of films and coatings
film growth and epitaxy
Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of bulk materials and thin films
Physics
Production techniques
Treatment of materials and its effects on microstructure and properties
title Preparation and properties of Mg0.2Zn0.8O:Al UV transparent conducting thin films deposited by RF magnetron sputtering at room temperature with rapid annealing : Zinc oxide
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