Single mask, simple structure micro rotational motor driven by electrostatic comb-drive actuators

We report a design and fabrication of a new micro rotational motor (MRM) using silicon micromachining technology with the overall diameter of 2.4 mm. This motor utilizes four silicon electrostatic comb-drive actuators to drive the outer ring (or rotor) through ratchet teeth. The novel design of the...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2012-01, Vol.22 (1), p.015008-7
Hauptverfasser:	Pham, Phuc Hong, Dao, Dzung Viet, Dang, Lam Bao, Sugiyama, Susumu
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Applied sciences Devices Electric potential Electronics Electrostatics Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Masks Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Motors Physics Precision engineering, watch making Rotational Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Silicon Teeth Transducers
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